JPH0257974B2 - - Google Patents

Info

Publication number
JPH0257974B2
JPH0257974B2 JP57011205A JP1120582A JPH0257974B2 JP H0257974 B2 JPH0257974 B2 JP H0257974B2 JP 57011205 A JP57011205 A JP 57011205A JP 1120582 A JP1120582 A JP 1120582A JP H0257974 B2 JPH0257974 B2 JP H0257974B2
Authority
JP
Japan
Prior art keywords
silane
aqueous solution
caustic soda
waste gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57011205A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58128146A (ja
Inventor
Masayasu Kitayama
Yoshiaki Sugimori
Shunichi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Original Assignee
Japan Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd filed Critical Japan Oxygen Co Ltd
Priority to JP57011205A priority Critical patent/JPS58128146A/ja
Publication of JPS58128146A publication Critical patent/JPS58128146A/ja
Publication of JPH0257974B2 publication Critical patent/JPH0257974B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
JP57011205A 1982-01-27 1982-01-27 吸収処理剤 Granted JPS58128146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57011205A JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57011205A JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP62293194A Division JPS63156537A (ja) 1987-11-20 1987-11-20 揮発性無機水素化物および揮発性無機ハロゲン化物の吸収処理剤並びにその吸収処理方法

Publications (2)

Publication Number Publication Date
JPS58128146A JPS58128146A (ja) 1983-07-30
JPH0257974B2 true JPH0257974B2 (enrdf_load_stackoverflow) 1990-12-06

Family

ID=11771510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57011205A Granted JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Country Status (1)

Country Link
JP (1) JPS58128146A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
JPS60125233A (ja) * 1983-12-08 1985-07-04 Mitsui Toatsu Chem Inc 排ガスの高度処理方法
JPS60175522A (ja) * 1984-02-23 1985-09-09 World Giken:Kk 半導体生産工程中の廃ガス乾式処理組成物
JPS60187335A (ja) * 1984-03-07 1985-09-24 Nippon Sanso Kk 粒状吸収処理剤
JPS6190726A (ja) * 1984-10-12 1986-05-08 Nippon Paionikusu Kk 除去剤
JPS61129026A (ja) * 1984-11-27 1986-06-17 Nippon Paionikusu Kk 排ガスの浄化方法
JPS6372338A (ja) * 1986-09-16 1988-04-02 Sadaka Sonobe 有害ガス吸着剤
JPH0749093B2 (ja) * 1987-02-28 1995-05-31 高純度シリコン株式会社 珪素化合物を含むガスの処理方法
JPS63156537A (ja) * 1987-11-20 1988-06-29 Nippon Sanso Kk 揮発性無機水素化物および揮発性無機ハロゲン化物の吸収処理剤並びにその吸収処理方法
DE4243389A1 (de) * 1992-12-21 1994-06-23 Sued Chemie Ag Verfahren zur Herstellung von Sorptionsmitteln zur Aufnahme von Flüssigkeiten
US5858909A (en) * 1996-09-27 1999-01-12 W. R. Grace & Co.-Conn. Siliceous oxide comprising an alkaline constituent
CN1309619A (zh) * 1998-04-09 2001-08-22 Uhp材料有限公司 乙硼烷的制备和纯化

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067784A (enrdf_load_stackoverflow) * 1973-10-23 1975-06-06

Also Published As

Publication number Publication date
JPS58128146A (ja) 1983-07-30

Similar Documents

Publication Publication Date Title
JPH0257974B2 (enrdf_load_stackoverflow)
JPS6151935B2 (enrdf_load_stackoverflow)
JPS6161619A (ja) 排ガスの処理方法
JPS6215246B2 (enrdf_load_stackoverflow)
KR100694369B1 (ko) 할로겐계 배기가스 정화제 및 정화방법
KR960010382B1 (ko) 폐가스 처리방법
JP2013138097A (ja) 酸混合液の回収システム、酸混合液の回収方法、および、シリコン材料の洗浄方法
JP3129945B2 (ja) 半導体製造排ガスの処理方法
TWI329530B (enrdf_load_stackoverflow)
KR920007856B1 (ko) 기체상태의 산성 할로겐 화합물의 제거방법
JPH04210293A (ja) 排水の水銀回収方法及び水銀回収装置
JPS61101231A (ja) フツ素ガスの除去方法
JP4979160B2 (ja) 脱硫化水素剤の再生処理方法
JPH0378132B2 (enrdf_load_stackoverflow)
JP3260825B2 (ja) 有害ガスの浄化方法
JPS60175522A (ja) 半導体生産工程中の廃ガス乾式処理組成物
JPH07213862A (ja) 塩素含有ガスの処理方法
JP2005169370A (ja) 硫化水素を含有するガスの脱硫化水素処理剤および処理方法および処理装置
JP2004181299A (ja) ベントガスの除害方法
JPS62176592A (ja) 次亜塩素酸ナトリウム含有廃液の処理装置
JP3265589B2 (ja) 二硫化炭素の除去方法
JP2767856B2 (ja) 排ガス処理装置及び排ガスの処理方法
JPH04210236A (ja) ドライエッチング排ガスの処理剤
JPH0457368B2 (enrdf_load_stackoverflow)
JPS54127871A (en) Recovery of chemicals used in regeneration in purified water manufacturing apparatus