JPH0257974B2 - - Google Patents

Info

Publication number
JPH0257974B2
JPH0257974B2 JP57011205A JP1120582A JPH0257974B2 JP H0257974 B2 JPH0257974 B2 JP H0257974B2 JP 57011205 A JP57011205 A JP 57011205A JP 1120582 A JP1120582 A JP 1120582A JP H0257974 B2 JPH0257974 B2 JP H0257974B2
Authority
JP
Japan
Prior art keywords
silane
aqueous solution
caustic soda
waste gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57011205A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58128146A (ja
Inventor
Masayasu Kitayama
Yoshiaki Sugimori
Shunichi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Original Assignee
Japan Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd filed Critical Japan Oxygen Co Ltd
Priority to JP57011205A priority Critical patent/JPS58128146A/ja
Publication of JPS58128146A publication Critical patent/JPS58128146A/ja
Publication of JPH0257974B2 publication Critical patent/JPH0257974B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP57011205A 1982-01-27 1982-01-27 吸収処理剤 Granted JPS58128146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57011205A JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57011205A JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP62293194A Division JPS63156537A (ja) 1987-11-20 1987-11-20 揮発性無機水素化物および揮発性無機ハロゲン化物の吸収処理剤並びにその吸収処理方法

Publications (2)

Publication Number Publication Date
JPS58128146A JPS58128146A (ja) 1983-07-30
JPH0257974B2 true JPH0257974B2 (cs) 1990-12-06

Family

ID=11771510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57011205A Granted JPS58128146A (ja) 1982-01-27 1982-01-27 吸収処理剤

Country Status (1)

Country Link
JP (1) JPS58128146A (cs)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
JPS60125233A (ja) * 1983-12-08 1985-07-04 Mitsui Toatsu Chem Inc 排ガスの高度処理方法
JPS60175522A (ja) * 1984-02-23 1985-09-09 World Giken:Kk 半導体生産工程中の廃ガス乾式処理組成物
JPS60187335A (ja) * 1984-03-07 1985-09-24 Nippon Sanso Kk 粒状吸収処理剤
JPS6190726A (ja) * 1984-10-12 1986-05-08 Nippon Paionikusu Kk 除去剤
JPS61129026A (ja) * 1984-11-27 1986-06-17 Nippon Paionikusu Kk 排ガスの浄化方法
JPS6372338A (ja) * 1986-09-16 1988-04-02 Sadaka Sonobe 有害ガス吸着剤
JPH0749093B2 (ja) * 1987-02-28 1995-05-31 高純度シリコン株式会社 珪素化合物を含むガスの処理方法
JPS63156537A (ja) * 1987-11-20 1988-06-29 Nippon Sanso Kk 揮発性無機水素化物および揮発性無機ハロゲン化物の吸収処理剤並びにその吸収処理方法
DE4243389A1 (de) * 1992-12-21 1994-06-23 Sued Chemie Ag Verfahren zur Herstellung von Sorptionsmitteln zur Aufnahme von Flüssigkeiten
US5858909A (en) * 1996-09-27 1999-01-12 W. R. Grace & Co.-Conn. Siliceous oxide comprising an alkaline constituent
US6165434A (en) * 1998-04-09 2000-12-26 Uhp Materials, Inc Purification of diborane

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067784A (cs) * 1973-10-23 1975-06-06

Also Published As

Publication number Publication date
JPS58128146A (ja) 1983-07-30

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