JPH0257699B2 - - Google Patents

Info

Publication number
JPH0257699B2
JPH0257699B2 JP61205180A JP20518086A JPH0257699B2 JP H0257699 B2 JPH0257699 B2 JP H0257699B2 JP 61205180 A JP61205180 A JP 61205180A JP 20518086 A JP20518086 A JP 20518086A JP H0257699 B2 JPH0257699 B2 JP H0257699B2
Authority
JP
Japan
Prior art keywords
resist
shutter
ultraviolet
processing
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61205180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362232A (ja
Inventor
Tetsuharu Arai
Shinji Suzuki
Yoshiki Mimura
Kazuyoshi Ueki
Hiroko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP20518086A priority Critical patent/JPS6362232A/ja
Publication of JPS6362232A publication Critical patent/JPS6362232A/ja
Publication of JPH0257699B2 publication Critical patent/JPH0257699B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP20518086A 1986-09-02 1986-09-02 レジスト処理方法 Granted JPS6362232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20518086A JPS6362232A (ja) 1986-09-02 1986-09-02 レジスト処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20518086A JPS6362232A (ja) 1986-09-02 1986-09-02 レジスト処理方法

Publications (2)

Publication Number Publication Date
JPS6362232A JPS6362232A (ja) 1988-03-18
JPH0257699B2 true JPH0257699B2 (cs) 1990-12-05

Family

ID=16502742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20518086A Granted JPS6362232A (ja) 1986-09-02 1986-09-02 レジスト処理方法

Country Status (1)

Country Link
JP (1) JPS6362232A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7526518B1 (ja) * 2023-02-27 2024-08-01 Ａｉメカテック株式会社 光照射方法及び光照射装置
JP7526517B1 (ja) * 2023-02-27 2024-08-01 Ａｉメカテック株式会社 光照射方法及び光照射装置
JP7564571B2 (ja) * 2023-02-27 2024-10-09 Ａｉメカテック株式会社 光照射装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS6114724A (ja) * 1984-06-30 1986-01-22 Ushio Inc 半導体ウエハ−への紫外線照射方法
JPH0812841B2 (ja) * 1986-06-16 1996-02-07 ウシオ電機株式会社 レジスト処理方法
JPH0812840B2 (ja) * 1986-06-16 1996-02-07 ウシオ電機株式会社 レジスト処理方法

Also Published As

Publication number Publication date
JPS6362232A (ja) 1988-03-18

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees