JPH025712B2 - - Google Patents
Info
- Publication number
- JPH025712B2 JPH025712B2 JP57028261A JP2826182A JPH025712B2 JP H025712 B2 JPH025712 B2 JP H025712B2 JP 57028261 A JP57028261 A JP 57028261A JP 2826182 A JP2826182 A JP 2826182A JP H025712 B2 JPH025712 B2 JP H025712B2
- Authority
- JP
- Japan
- Prior art keywords
- deposition source
- source gas
- gas
- nitrogen
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 63
- 239000000463 material Substances 0.000 claims description 52
- 238000000151 deposition Methods 0.000 claims description 26
- 230000008021 deposition Effects 0.000 claims description 26
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 238000003786 synthesis reaction Methods 0.000 claims description 15
- 229910003902 SiCl 4 Inorganic materials 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical class N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- -1 silicon halides Chemical class 0.000 claims description 6
- 150000004678 hydrides Chemical class 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 238000001556 precipitation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 9
- 230000035939 shock Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 125000001475 halogen functional group Chemical group 0.000 description 3
- 238000011835 investigation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910007991 Si-N Inorganic materials 0.000 description 2
- 229910006294 Si—N Inorganic materials 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Producing Shaped Articles From Materials (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57028261A JPS58145665A (ja) | 1982-02-24 | 1982-02-24 | 透光性Ｓｉ―Ｎ―Ｂ系非晶質材料およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57028261A JPS58145665A (ja) | 1982-02-24 | 1982-02-24 | 透光性Ｓｉ―Ｎ―Ｂ系非晶質材料およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58145665A JPS58145665A (ja) | 1983-08-30 |
| JPH025712B2 true JPH025712B2 (en, 2012) | 1990-02-05 |
Family
ID=12243622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57028261A Granted JPS58145665A (ja) | 1982-02-24 | 1982-02-24 | 透光性Ｓｉ―Ｎ―Ｂ系非晶質材料およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58145665A (en, 2012) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59207811A (ja) * | 1983-05-10 | 1984-11-26 | Res Dev Corp Of Japan | 層はく離性の改善された窒化ホウ素組成物 |
| JPS60155508A (ja) * | 1984-08-02 | 1985-08-15 | Res Dev Corp Of Japan | 耐湿性にすぐれた透明性非晶質窒化ホウ素組成物 |
| JPS6283306A (ja) * | 1985-10-04 | 1987-04-16 | Res Dev Corp Of Japan | 透明なｂｎ系セラミックス材料 |
| JPS6283379A (ja) * | 1986-05-12 | 1987-04-16 | 新技術事業団 | 透明性ｂｎ系セラミツクスの製造方法 |
-
1982
- 1982-02-24 JP JP57028261A patent/JPS58145665A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58145665A (ja) | 1983-08-30 |
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