JPH0256825B2 - - Google Patents

Info

Publication number
JPH0256825B2
JPH0256825B2 JP59034044A JP3404484A JPH0256825B2 JP H0256825 B2 JPH0256825 B2 JP H0256825B2 JP 59034044 A JP59034044 A JP 59034044A JP 3404484 A JP3404484 A JP 3404484A JP H0256825 B2 JPH0256825 B2 JP H0256825B2
Authority
JP
Japan
Prior art keywords
piezoelectric
thickness
piezoelectric element
piezoelectric actuator
bent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59034044A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60178677A (ja
Inventor
Shinji Hara
Takashi Yoshizawa
Hiroshi Hosaka
Naoyuki Tamaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59034044A priority Critical patent/JPS60178677A/ja
Publication of JPS60178677A publication Critical patent/JPS60178677A/ja
Publication of JPH0256825B2 publication Critical patent/JPH0256825B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59034044A 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ Granted JPS60178677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59034044A JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034044A JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS60178677A JPS60178677A (ja) 1985-09-12
JPH0256825B2 true JPH0256825B2 (OSRAM) 1990-12-03

Family

ID=12403314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034044A Granted JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS60178677A (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0436231Y2 (OSRAM) * 1985-06-28 1992-08-26
JPH01261879A (ja) * 1988-04-13 1989-10-18 Jgc Corp 積層型変位素子
JPH02240977A (ja) * 1989-03-14 1990-09-25 Toshiba Corp 変位発生装置
JP3185226B2 (ja) * 1991-01-30 2001-07-09 株式会社村田製作所 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子
DE4332966A1 (de) * 1993-09-28 1995-03-30 Philips Patentverwaltung Torsionsaktuator und ein Verfahren zu dessen Herstellung
JPH0774410A (ja) * 1994-09-06 1995-03-17 Ngk Spark Plug Co Ltd 電歪積層板の製造方法
EP0784349B1 (en) * 1996-01-11 2005-06-01 Wac Data Services Co. Ltd. Stacked piezoelectric actuator and method of operation
EP1019972B1 (de) * 1997-09-30 2006-11-15 Argillon GmbH Piezoelektrisches element
SG97764A1 (en) * 1998-08-21 2003-08-20 Inst Data Storage Multilayer piezoeletric actuator with bending deformation and method for its manufacture
US6367132B2 (en) * 1998-08-31 2002-04-09 Eastman Kodak Company Method of making a print head
EP1075079B1 (en) 1998-12-21 2007-06-13 Seiko Epson Corporation Piezoelectric actuator, time piece, and portable device
JP2000332313A (ja) 1999-05-21 2000-11-30 Matsushita Electric Ind Co Ltd 薄膜圧電型バイモルフ素子及びその応用
JP4631124B2 (ja) * 2000-03-30 2011-02-16 セイコーエプソン株式会社 圧電アクチュエータ、時計および機器
KR100485596B1 (ko) * 2002-06-04 2005-04-27 한국과학기술연구원 밴더형 적층 액츄에이터
US6888291B2 (en) * 2002-10-31 2005-05-03 The Boeing Company Electrical system for electrostrictive bimorph actuator
DE102007003280A1 (de) * 2007-01-23 2008-07-24 Epcos Ag Piezoelektrisches Bauelement

Also Published As

Publication number Publication date
JPS60178677A (ja) 1985-09-12

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