JPH0256544B2 - - Google Patents
Info
- Publication number
- JPH0256544B2 JPH0256544B2 JP59166107A JP16610784A JPH0256544B2 JP H0256544 B2 JPH0256544 B2 JP H0256544B2 JP 59166107 A JP59166107 A JP 59166107A JP 16610784 A JP16610784 A JP 16610784A JP H0256544 B2 JPH0256544 B2 JP H0256544B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum processing
- valve body
- hole
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
- F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Taps Or Cocks (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16610784A JPS6145175A (ja) | 1984-08-08 | 1984-08-08 | 仕切弁 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16610784A JPS6145175A (ja) | 1984-08-08 | 1984-08-08 | 仕切弁 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6145175A JPS6145175A (ja) | 1986-03-05 |
| JPH0256544B2 true JPH0256544B2 (OSRAM) | 1990-11-30 |
Family
ID=15825145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16610784A Granted JPS6145175A (ja) | 1984-08-08 | 1984-08-08 | 仕切弁 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6145175A (OSRAM) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571184Y2 (OSRAM) * | 1978-01-25 | 1982-01-08 |
-
1984
- 1984-08-08 JP JP16610784A patent/JPS6145175A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6145175A (ja) | 1986-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5137063A (en) | Vented vacuum semiconductor wafer cassette | |
| US5217053A (en) | Vented vacuum semiconductor wafer cassette | |
| JPH01163951A (ja) | 真空装置及びそれを用いてプロセスを行う方法 | |
| JPH0256544B2 (OSRAM) | ||
| JPH10252943A (ja) | 真空バルブ | |
| JPH05306779A (ja) | ゲート弁 | |
| JPS6237327Y2 (OSRAM) | ||
| JPS6257377B2 (OSRAM) | ||
| JPS63106468A (ja) | 流体経路遮断弁 | |
| JPH02305964A (ja) | 真空処理装置 | |
| JPH0341103Y2 (OSRAM) | ||
| JPH02213469A (ja) | 一方の雰囲気から他方の雰囲気へ工作物を移送する移送装置及び処理室へ工作物を給送し、排出を行う方法 | |
| JPH0492169A (ja) | 開閉弁 | |
| JP3407420B2 (ja) | ゲート弁 | |
| JPH0245920A (ja) | 半導体製造装置 | |
| JPH04119276A (ja) | 真空バルブ | |
| JP3258088B2 (ja) | 真空処理装置 | |
| JPH0214872Y2 (OSRAM) | ||
| JPS6310521A (ja) | 真空処理室 | |
| JPH0330320A (ja) | 気相化学反応生成装置のロードロック機構 | |
| JPH06336980A (ja) | 排気装置 | |
| JPH0546202Y2 (OSRAM) | ||
| JPH04159466A (ja) | 真空装置 | |
| JPS60115227A (ja) | プラズマ等の処理方法とその装置 | |
| JPH04106583U (ja) | 真空用ゲートバルブ |