JPH0252537B2 - - Google Patents

Info

Publication number
JPH0252537B2
JPH0252537B2 JP6220183A JP6220183A JPH0252537B2 JP H0252537 B2 JPH0252537 B2 JP H0252537B2 JP 6220183 A JP6220183 A JP 6220183A JP 6220183 A JP6220183 A JP 6220183A JP H0252537 B2 JPH0252537 B2 JP H0252537B2
Authority
JP
Japan
Prior art keywords
liquid
zone
container
carrier gas
reactive liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6220183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59189932A (ja
Inventor
Yutaka Yoriume
Juichi Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6220183A priority Critical patent/JPS59189932A/ja
Publication of JPS59189932A publication Critical patent/JPS59189932A/ja
Publication of JPH0252537B2 publication Critical patent/JPH0252537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00Feed or outlet devices; Feed or outlet control devices
    • B01J4/001Feed or outlet devices as such, e.g. feeding tubes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/80Feeding the burner or the burner-heated deposition site
    • C03B2207/85Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/80Feeding the burner or the burner-heated deposition site
    • C03B2207/85Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/89Controlling the liquid level in or supply to the tank
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/80Feeding the burner or the burner-heated deposition site
    • C03B2207/90Feeding the burner or the burner-heated deposition site with vapour generated from solid glass precursors, i.e. by sublimation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP6220183A 1983-04-11 1983-04-11 反応性液体容器 Granted JPS59189932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6220183A JPS59189932A (ja) 1983-04-11 1983-04-11 反応性液体容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6220183A JPS59189932A (ja) 1983-04-11 1983-04-11 反応性液体容器

Publications (2)

Publication Number Publication Date
JPS59189932A JPS59189932A (ja) 1984-10-27
JPH0252537B2 true JPH0252537B2 (ru) 1990-11-13

Family

ID=13193291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6220183A Granted JPS59189932A (ja) 1983-04-11 1983-04-11 反応性液体容器

Country Status (1)

Country Link
JP (1) JPS59189932A (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002012780A1 (en) * 2000-08-04 2002-02-14 Arch Specialty Chemicals, Inc. Automatic refill system for ultra pure or contamination sensitive chemicals
JP4558538B2 (ja) * 2004-03-04 2010-10-06 エシコン・インコーポレイテッド 液体滅菌剤を滅菌器に送達する方法
US8440139B2 (en) 2004-03-04 2013-05-14 Ethican, Inc. Method of delivering liquid sterilant to a sterilizer

Also Published As

Publication number Publication date
JPS59189932A (ja) 1984-10-27

Similar Documents

Publication Publication Date Title
US4140735A (en) Process and apparatus for bubbling gas through a high purity liquid
US7547363B2 (en) Solid organometallic compound-filled container and filling method thereof
EP1837421A2 (en) Crystal preparing device , crystal preparing method, and crystal
GB2224218A (en) Method of producing saturated vapour of solid metal organic compounds in a metal organic chemical vapour deposition method.
US20080035607A1 (en) Method and Apparatus for the Etching of Microstructures
EP2418300A2 (en) Delivery device and method of use thereof
JPH01265511A (ja) 気相成長に用いる担体担持有機金属化合物及びこれを用いた気相成長用有機金属化合物供給装置
JPH0252537B2 (ru)
Oldham et al. The Growth and Etching of Si through Windows in SiO2
GB1412687A (en) Growing crystals from solution
US3902860A (en) Thermal treatment of semiconducting compounds having one or more volatile components
JPS6070176A (ja) 固体ソ−ス蒸発ボンベ
JPH0963965A (ja) 有機金属供給装置および有機金属気相成長装置
JP3067350B2 (ja) 縦型減圧化学気相成長装置
US3858553A (en) Apparatus for the epitaxial growth of semiconducting material by liquid phase epitaxy from at least two source solutions
US3997377A (en) Method of making a liquid phase epitaxial-layers of gallium phosphide on multiple wafers
SU994959A1 (ru) Устройство дл изготовлени образцов с косым шлифом
JPH04177826A (ja) 半導体装置製造用薬品容器
Jachimska et al. Effects of motion in n-hexanol solution on the lifetime of bubbles at the solution surface
US3342619A (en) Method for growing germania films
JPS5648237A (en) Evacuated gaseous phase reactor
JPS6355194A (ja) 有機金属化合物の充填方法
JPH03116739A (ja) 気相エピタキシャル成長用蒸発器
US3972689A (en) Method for vapor growing crystals
JPH0612825Y2 (ja) 蒸発器