JPH0251043A - 隔体の気体透過試験方法 - Google Patents
隔体の気体透過試験方法Info
- Publication number
- JPH0251043A JPH0251043A JP20247288A JP20247288A JPH0251043A JP H0251043 A JPH0251043 A JP H0251043A JP 20247288 A JP20247288 A JP 20247288A JP 20247288 A JP20247288 A JP 20247288A JP H0251043 A JPH0251043 A JP H0251043A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- partition
- test method
- ozone
- permeation test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 22
- 239000007789 gas Substances 0.000 claims abstract description 92
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 47
- 239000000126 substance Substances 0.000 claims abstract description 26
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 19
- HWYHZTIRURJOHG-UHFFFAOYSA-N luminol Chemical compound O=C1NNC(=O)C2=C1C(N)=CC=C2 HWYHZTIRURJOHG-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000012159 carrier gas Substances 0.000 claims abstract description 10
- 239000012466 permeate Substances 0.000 claims abstract description 10
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 22
- 239000005977 Ethylene Substances 0.000 claims description 22
- 238000005192 partition Methods 0.000 claims description 19
- 238000010998 test method Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004377 microelectronic Methods 0.000 claims description 6
- 238000005057 refrigeration Methods 0.000 claims description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- 150000001336 alkenes Chemical class 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 5
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 12
- 239000011261 inert gas Substances 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000005587 bubbling Effects 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 description 14
- 238000010586 diagram Methods 0.000 description 10
- 238000004020 luminiscence type Methods 0.000 description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000035699 permeability Effects 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 239000002828 fuel tank Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000007806 chemical reaction intermediate Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000004663 dialkyl amino group Chemical group 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 238000005015 mass analyzed ion kinetic energy spectroscopy Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920006280 packaging film Polymers 0.000 description 1
- 239000012785 packaging film Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 239000004627 regenerated cellulose Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20247288A JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20247288A JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0251043A true JPH0251043A (ja) | 1990-02-21 |
| JPH0553377B2 JPH0553377B2 (OSRAM) | 1993-08-09 |
Family
ID=16458087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20247288A Granted JPH0251043A (ja) | 1988-08-11 | 1988-08-11 | 隔体の気体透過試験方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0251043A (OSRAM) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05105928A (ja) * | 1991-05-20 | 1993-04-27 | Naigai Mariaburu Kk | マグネシウム反応確認法 |
| JPH07244023A (ja) * | 1993-08-30 | 1995-09-19 | Millipore Investment Holdings Ltd | 音響放射を使用する多孔質構造体のための完全性試験 |
| JP2008209397A (ja) * | 2006-11-14 | 2008-09-11 | Millipore Corp | 多孔性材料の迅速な完全性試験 |
| JP2009271072A (ja) * | 2008-05-02 | 2009-11-19 | Mocon Inc | 閉鎖されたセル内に検体を消費するセンサを有する電量検体検出装置 |
| JP2011214840A (ja) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | 酸素透過量の測定方法及び測定装置 |
| JP2011214841A (ja) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | 酸素バリア体の欠陥検出方法及び装置 |
| US8647876B2 (en) | 2010-03-31 | 2014-02-11 | Fujifilm Corporation | Oxygen permeability measuring apparatus and method, and defect inspection apparatus and method |
| CN104777084A (zh) * | 2015-03-23 | 2015-07-15 | 中山大学 | 一种基于锁相放大器的气体透过率光学测量方法及系统 |
| CN119009364A (zh) * | 2024-08-15 | 2024-11-22 | 广东明浩玻纤有限公司 | 一种超细玻璃纤维蓄电池隔板的制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916513A (OSRAM) * | 1972-04-17 | 1974-02-14 | ||
| JPS553702A (en) * | 1978-05-30 | 1980-01-11 | Kazuo Tsubone | Chemically illuminating float |
| JPS5861446A (ja) * | 1981-10-07 | 1983-04-12 | Fuji Photo Film Co Ltd | 過酸化水素の定量方法 |
| JPS60149950A (ja) * | 1984-01-17 | 1985-08-07 | Hitachi Ltd | ケミルミネツセントの検出法 |
-
1988
- 1988-08-11 JP JP20247288A patent/JPH0251043A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916513A (OSRAM) * | 1972-04-17 | 1974-02-14 | ||
| JPS553702A (en) * | 1978-05-30 | 1980-01-11 | Kazuo Tsubone | Chemically illuminating float |
| JPS5861446A (ja) * | 1981-10-07 | 1983-04-12 | Fuji Photo Film Co Ltd | 過酸化水素の定量方法 |
| JPS60149950A (ja) * | 1984-01-17 | 1985-08-07 | Hitachi Ltd | ケミルミネツセントの検出法 |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05105928A (ja) * | 1991-05-20 | 1993-04-27 | Naigai Mariaburu Kk | マグネシウム反応確認法 |
| JPH07244023A (ja) * | 1993-08-30 | 1995-09-19 | Millipore Investment Holdings Ltd | 音響放射を使用する多孔質構造体のための完全性試験 |
| JP2008209397A (ja) * | 2006-11-14 | 2008-09-11 | Millipore Corp | 多孔性材料の迅速な完全性試験 |
| JP2009271072A (ja) * | 2008-05-02 | 2009-11-19 | Mocon Inc | 閉鎖されたセル内に検体を消費するセンサを有する電量検体検出装置 |
| JP2011214840A (ja) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | 酸素透過量の測定方法及び測定装置 |
| JP2011214841A (ja) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | 酸素バリア体の欠陥検出方法及び装置 |
| US8647876B2 (en) | 2010-03-31 | 2014-02-11 | Fujifilm Corporation | Oxygen permeability measuring apparatus and method, and defect inspection apparatus and method |
| CN104777084A (zh) * | 2015-03-23 | 2015-07-15 | 中山大学 | 一种基于锁相放大器的气体透过率光学测量方法及系统 |
| CN119009364A (zh) * | 2024-08-15 | 2024-11-22 | 广东明浩玻纤有限公司 | 一种超细玻璃纤维蓄电池隔板的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0553377B2 (OSRAM) | 1993-08-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |