JPH0249204Y2 - - Google Patents
Info
- Publication number
- JPH0249204Y2 JPH0249204Y2 JP16338786U JP16338786U JPH0249204Y2 JP H0249204 Y2 JPH0249204 Y2 JP H0249204Y2 JP 16338786 U JP16338786 U JP 16338786U JP 16338786 U JP16338786 U JP 16338786U JP H0249204 Y2 JPH0249204 Y2 JP H0249204Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- cleanliness
- clean room
- cargo
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000000750 progressive effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical class C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338786U JPH0249204Y2 (US07534539-20090519-C00280.png) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16338786U JPH0249204Y2 (US07534539-20090519-C00280.png) | 1986-10-23 | 1986-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6367505U JPS6367505U (US07534539-20090519-C00280.png) | 1988-05-07 |
| JPH0249204Y2 true JPH0249204Y2 (US07534539-20090519-C00280.png) | 1990-12-25 |
Family
ID=31091537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16338786U Expired JPH0249204Y2 (US07534539-20090519-C00280.png) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249204Y2 (US07534539-20090519-C00280.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2632419B2 (ja) * | 1989-11-30 | 1997-07-23 | 株式会社ダイフク | 荷保管設備 |
| JP2009012965A (ja) * | 2007-07-09 | 2009-01-22 | Asyst Technologies Japan Inc | ストッカ装置 |
-
1986
- 1986-10-23 JP JP16338786U patent/JPH0249204Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6367505U (US07534539-20090519-C00280.png) | 1988-05-07 |
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