JPH0248899U - - Google Patents

Info

Publication number
JPH0248899U
JPH0248899U JP12746388U JP12746388U JPH0248899U JP H0248899 U JPH0248899 U JP H0248899U JP 12746388 U JP12746388 U JP 12746388U JP 12746388 U JP12746388 U JP 12746388U JP H0248899 U JPH0248899 U JP H0248899U
Authority
JP
Japan
Prior art keywords
electron beam
processing chamber
inert gas
workpiece
supply port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12746388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12746388U priority Critical patent/JPH0248899U/ja
Publication of JPH0248899U publication Critical patent/JPH0248899U/ja
Pending legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP12746388U 1988-09-29 1988-09-29 Pending JPH0248899U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12746388U JPH0248899U (OSRAM) 1988-09-29 1988-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12746388U JPH0248899U (OSRAM) 1988-09-29 1988-09-29

Publications (1)

Publication Number Publication Date
JPH0248899U true JPH0248899U (OSRAM) 1990-04-04

Family

ID=31379920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12746388U Pending JPH0248899U (OSRAM) 1988-09-29 1988-09-29

Country Status (1)

Country Link
JP (1) JPH0248899U (OSRAM)

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