JPH0247859B2 - - Google Patents

Info

Publication number
JPH0247859B2
JPH0247859B2 JP56096648A JP9664881A JPH0247859B2 JP H0247859 B2 JPH0247859 B2 JP H0247859B2 JP 56096648 A JP56096648 A JP 56096648A JP 9664881 A JP9664881 A JP 9664881A JP H0247859 B2 JPH0247859 B2 JP H0247859B2
Authority
JP
Japan
Prior art keywords
pattern
inspected
mask
automatic focusing
reference pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56096648A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57212404A (en
Inventor
Hideaki Kawashima
Kyoshi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9664881A priority Critical patent/JPS57212404A/ja
Publication of JPS57212404A publication Critical patent/JPS57212404A/ja
Publication of JPH0247859B2 publication Critical patent/JPH0247859B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9664881A 1981-06-24 1981-06-24 Comparison type inspector Granted JPS57212404A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9664881A JPS57212404A (en) 1981-06-24 1981-06-24 Comparison type inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9664881A JPS57212404A (en) 1981-06-24 1981-06-24 Comparison type inspector

Publications (2)

Publication Number Publication Date
JPS57212404A JPS57212404A (en) 1982-12-27
JPH0247859B2 true JPH0247859B2 (https=) 1990-10-23

Family

ID=14170640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9664881A Granted JPS57212404A (en) 1981-06-24 1981-06-24 Comparison type inspector

Country Status (1)

Country Link
JP (1) JPS57212404A (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5639516A (en) * 1979-09-10 1981-04-15 Fujitsu Ltd Comparative inspecting mechanism of photomask

Also Published As

Publication number Publication date
JPS57212404A (en) 1982-12-27

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