JPH0246907B2 - - Google Patents
Info
- Publication number
- JPH0246907B2 JPH0246907B2 JP60294863A JP29486385A JPH0246907B2 JP H0246907 B2 JPH0246907 B2 JP H0246907B2 JP 60294863 A JP60294863 A JP 60294863A JP 29486385 A JP29486385 A JP 29486385A JP H0246907 B2 JPH0246907 B2 JP H0246907B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- piezoelectric ceramic
- layers
- polarization
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 52
- 230000010287 polarization Effects 0.000 claims description 34
- 239000011810 insulating material Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 35
- 230000001133 acceleration Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153765A JPS62153765A (ja) | 1987-07-08 |
| JPH0246907B2 true JPH0246907B2 (de) | 1990-10-17 |
Family
ID=17813228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60294863A Granted JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153765A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2011001515A1 (ja) * | 2009-06-30 | 2012-12-10 | 富士通株式会社 | 加速度センサ、振動発電デバイス及び加速度センサの製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016034320A1 (en) * | 2014-09-02 | 2016-03-10 | Asml Netherlands B.V. | Sensor, object positioning system, lithographic apparatus and device device manufacturing method |
| JP6476730B2 (ja) * | 2014-10-21 | 2019-03-06 | セイコーエプソン株式会社 | 力検出装置及びロボット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120478A (en) * | 1977-03-29 | 1978-10-20 | Kobayashi Rigaku Kenkiyuushiyo | Acceleration type oscillation pick up |
-
1985
- 1985-12-27 JP JP60294863A patent/JPS62153765A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120478A (en) * | 1977-03-29 | 1978-10-20 | Kobayashi Rigaku Kenkiyuushiyo | Acceleration type oscillation pick up |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2011001515A1 (ja) * | 2009-06-30 | 2012-12-10 | 富士通株式会社 | 加速度センサ、振動発電デバイス及び加速度センサの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153765A (ja) | 1987-07-08 |
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