JPH0246046Y2 - - Google Patents

Info

Publication number
JPH0246046Y2
JPH0246046Y2 JP1986133760U JP13376086U JPH0246046Y2 JP H0246046 Y2 JPH0246046 Y2 JP H0246046Y2 JP 1986133760 U JP1986133760 U JP 1986133760U JP 13376086 U JP13376086 U JP 13376086U JP H0246046 Y2 JPH0246046 Y2 JP H0246046Y2
Authority
JP
Japan
Prior art keywords
shutter
resist
drive mechanism
lamp
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986133760U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339935U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986133760U priority Critical patent/JPH0246046Y2/ja
Publication of JPS6339935U publication Critical patent/JPS6339935U/ja
Application granted granted Critical
Publication of JPH0246046Y2 publication Critical patent/JPH0246046Y2/ja
Expired legal-status Critical Current

Links

JP1986133760U 1986-09-02 1986-09-02 Expired JPH0246046Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986133760U JPH0246046Y2 (enrdf_load_html_response) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986133760U JPH0246046Y2 (enrdf_load_html_response) 1986-09-02 1986-09-02

Publications (2)

Publication Number Publication Date
JPS6339935U JPS6339935U (enrdf_load_html_response) 1988-03-15
JPH0246046Y2 true JPH0246046Y2 (enrdf_load_html_response) 1990-12-05

Family

ID=31034368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986133760U Expired JPH0246046Y2 (enrdf_load_html_response) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPH0246046Y2 (enrdf_load_html_response)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321324A (en) * 1976-08-11 1978-02-27 Toyota Motor Corp Heater for engine intake
JPS6045242A (ja) * 1983-08-23 1985-03-11 Oki Electric Ind Co Ltd パターン形成方法
JPS59196735A (ja) * 1983-04-20 1984-11-08 Matsushita Electric Ind Co Ltd 紫外線照射装置
US4548688A (en) * 1983-05-23 1985-10-22 Fusion Semiconductor Systems Hardening of photoresist

Also Published As

Publication number Publication date
JPS6339935U (enrdf_load_html_response) 1988-03-15

Similar Documents

Publication Publication Date Title
JP3166065B2 (ja) 処理装置及び処理方法
JPH0246046Y2 (enrdf_load_html_response)
JPH0246045Y2 (enrdf_load_html_response)
JPH0244513Y2 (enrdf_load_html_response)
CN113176709A (zh) 基板处理装置和基板处理方法
JP3194441B2 (ja) レジストの硬化方法及びレジスト処理装置
JP6450333B2 (ja) 基板処理方法、基板処理装置及び基板処理システム
JPS62211646A (ja) レジスト処理方法
TWI862604B (zh) 光照射裝置、光照射方法及記憶媒體
JP2732450B2 (ja) 光照射器
JP6145065B2 (ja) 基板処理方法、基板処理装置及び記録媒体
JP3783615B2 (ja) 大型基板に塗布されたレジストの硬化方法および装置
TW202217929A (zh) 基板處理方法、基板處理裝置及記錄媒體
JPS63234527A (ja) レジスト処理方法
JPS62187345A (ja) レジスト処理方法
JPS62295420A (ja) レジスト処理方法
JPH11154639A (ja) 周辺露光装置およびその方法
JP2000150551A (ja) リードフレームの表面処理機構およびその方法
TW201935589A (zh) 基板處理裝置、基板處理方法及電腦可讀取記錄媒體
JPH0257699B2 (enrdf_load_html_response)
JPH0740546B2 (ja) レジスト処理方法
JPS62295417A (ja) レジスト処理方法
JP3199548B2 (ja) 露光装置および露光方法
KR102492396B1 (ko) 기판 처리 방법, 기판 처리 장치 및 기판 처리 시스템
JPH0515058B2 (enrdf_load_html_response)