JPH0245475U - - Google Patents
Info
- Publication number
- JPH0245475U JPH0245475U JP12428788U JP12428788U JPH0245475U JP H0245475 U JPH0245475 U JP H0245475U JP 12428788 U JP12428788 U JP 12428788U JP 12428788 U JP12428788 U JP 12428788U JP H0245475 U JPH0245475 U JP H0245475U
- Authority
- JP
- Japan
- Prior art keywords
- fixing jig
- probe
- height
- probe card
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 6
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図イは本考案の一実施例を示す平面図、第
１図ロは同側面図、第１図ハは本考案に係るプロ
ーブカードを示す平面図、第１図ニは同側面図、
第１図ホは本考案に係る固定治具を示す平面図、
第１図ヘは同側面図、第２図イは半導体素子を示
す外観図、第２図ロは同断面図、第３図イは従来
例を示す平面図、第３図ロは同側面図、第３図ハ
は従来に係るプローブカードを示す平面図、第３
図ニは同側面図、第３図ホは従来に係る固定治具
を示す平面図、第３図ヘは同側面図である。
１…プローブ針、２…固定治具ストツパ、３…
被測定用半導体素子の素子搭載部、４…ガイドシ
ヤフト、５…プローブカード、６…端子部、７…
取付ネジ、８…固定治具。
FIG. 1A is a plan view showing an embodiment of the present invention, FIG. 1B is a side view of the same, FIG. 1C is a plan view showing a probe card according to the present invention, FIG. 1D is a side view of the same,
FIG. 1E is a plan view showing a fixing jig according to the present invention;
Fig. 1F is a side view of the same, Fig. 2A is an external view showing the semiconductor element, Fig. 2B is a sectional view of the same, Fig. 3A is a plan view showing the conventional example, and Fig. 3B is a side view of the same. , FIG. 3C is a plan view showing a conventional probe card;
FIG. D is a side view of the same, FIG. 3E is a plan view showing a conventional fixing jig, and FIG. 3F is a side view of the same. 1... Probe needle, 2... Fixing jig stopper, 3...
Element mounting part of semiconductor element to be measured, 4... Guide shaft, 5... Probe card, 6... Terminal part, 7...
Mounting screw, 8...Fixing jig.
Claims (1)
えた固定治具と、前記半導体素子に電気的に接触
させる複数のプローブ針を備えたプローブカード
と、前記固定治具及びプローブカードの間に介装
され半導体素子とプローブカードのプローブ針と
が接触する位置関係に保持する固定治具ストツパ
とを有し、前記固定治具ストツパの高さを前記プ
ローブ針の先端の高さ位置より高く設定するとと
もに、前記素子搭載部の高さを前記固定治具スト
ツパの高さに応じて高く設定したことを特徴とす
る半導体素子測定治具。 A fixing jig including an element mounting portion for mounting a semiconductor device to be measured, a probe card including a plurality of probe needles for electrically contacting the semiconductor device, and an intervening device between the fixing jig and the probe card. and a fixing jig stopper for holding the probe needle of the probe card in a positional relationship in which the mounted semiconductor element and the probe needle of the probe card are in contact with each other, and the height of the fixing jig stopper is set higher than the height of the tip of the probe needle. The semiconductor device measuring jig is further characterized in that the height of the device mounting portion is set high in accordance with the height of the fixing jig stopper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428788U JPH0245475U (en) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12428788U JPH0245475U (en) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0245475U true JPH0245475U (en) | 1990-03-28 |
Family
ID=31373893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12428788U Pending JPH0245475U (en) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0245475U (en) |
-
1988
- 1988-09-22 JP JP12428788U patent/JPH0245475U/ja active Pending
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