JPH0245340B2 - - Google Patents
Info
- Publication number
- JPH0245340B2 JPH0245340B2 JP61146897A JP14689786A JPH0245340B2 JP H0245340 B2 JPH0245340 B2 JP H0245340B2 JP 61146897 A JP61146897 A JP 61146897A JP 14689786 A JP14689786 A JP 14689786A JP H0245340 B2 JPH0245340 B2 JP H0245340B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- forming
- source
- drain
- bipolar transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 230000000295 complement effect Effects 0.000 description 7
- 239000005360 phosphosilicate glass Substances 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61146897A JPS6216559A (ja) | 1986-06-25 | 1986-06-25 | 半導体装置の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61146897A JPS6216559A (ja) | 1986-06-25 | 1986-06-25 | 半導体装置の製法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8136779A Division JPS567462A (en) | 1979-06-29 | 1979-06-29 | Semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216559A JPS6216559A (ja) | 1987-01-24 |
| JPH0245340B2 true JPH0245340B2 (enrdf_load_stackoverflow) | 1990-10-09 |
Family
ID=15418045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61146897A Granted JPS6216559A (ja) | 1986-06-25 | 1986-06-25 | 半導体装置の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6216559A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5204043A (en) * | 1990-01-13 | 1993-04-20 | Toyoda Gosei Co., Ltd. | Method of manufacturing steering wheel |
| JP2558911Y2 (ja) * | 1991-02-14 | 1998-01-14 | 株式会社東海理化電機製作所 | ステアリングホイール |
-
1986
- 1986-06-25 JP JP61146897A patent/JPS6216559A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6216559A (ja) | 1987-01-24 |
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