JPH0242403B2 - - Google Patents

Info

Publication number
JPH0242403B2
JPH0242403B2 JP13167283A JP13167283A JPH0242403B2 JP H0242403 B2 JPH0242403 B2 JP H0242403B2 JP 13167283 A JP13167283 A JP 13167283A JP 13167283 A JP13167283 A JP 13167283A JP H0242403 B2 JPH0242403 B2 JP H0242403B2
Authority
JP
Japan
Prior art keywords
measured
light
scanning
reference gauge
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13167283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6022614A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13167283A priority Critical patent/JPS6022614A/ja
Publication of JPS6022614A publication Critical patent/JPS6022614A/ja
Publication of JPH0242403B2 publication Critical patent/JPH0242403B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13167283A 1983-07-18 1983-07-18 光学的形状測定装置 Granted JPS6022614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13167283A JPS6022614A (ja) 1983-07-18 1983-07-18 光学的形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13167283A JPS6022614A (ja) 1983-07-18 1983-07-18 光学的形状測定装置

Publications (2)

Publication Number Publication Date
JPS6022614A JPS6022614A (ja) 1985-02-05
JPH0242403B2 true JPH0242403B2 (zh) 1990-09-21

Family

ID=15063524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13167283A Granted JPS6022614A (ja) 1983-07-18 1983-07-18 光学的形状測定装置

Country Status (1)

Country Link
JP (1) JPS6022614A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08191005A (ja) * 1995-01-10 1996-07-23 Rohm Co Ltd チップ型可変抵抗器

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6287805A (ja) * 1985-10-14 1987-04-22 Mitsutoyo Mfg Corp 丸軸状部材の形状測定装置
JPS6332308A (ja) * 1986-07-25 1988-02-12 Mitsutoyo Corp クランクシヤフトの非接触形状測定方法及び装置
JPH0833292B2 (ja) * 1991-08-31 1996-03-29 バンドー化学株式会社 クリーニングブレードの稜線検査装置
JP3540648B2 (ja) * 1999-01-19 2004-07-07 シャープ株式会社 プラズマ反応装置に用いるギャップ測定装置
JP5079562B2 (ja) * 2008-03-24 2012-11-21 株式会社ハーモニック・ドライブ・システムズ 輪郭形状測定方法
DE102008060621B3 (de) * 2008-12-05 2010-08-12 Carl Zeiss Ag Optische Anordnung zum berührungslosen Messen oder Prüfen einer Körperoberfläche
GB2507828B (en) * 2013-02-04 2015-05-13 Messier Dowty Ltd Deformation Detection Tool & Method for Detecting Deformation
CN111811439B (zh) * 2020-05-13 2022-03-08 河北省计量监督检测研究院廊坊分院 刀口形直尺工作棱边直线度自动测量方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08191005A (ja) * 1995-01-10 1996-07-23 Rohm Co Ltd チップ型可変抵抗器

Also Published As

Publication number Publication date
JPS6022614A (ja) 1985-02-05

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