JPH0242060U - - Google Patents
Info
- Publication number
- JPH0242060U JPH0242060U JP11990788U JP11990788U JPH0242060U JP H0242060 U JPH0242060 U JP H0242060U JP 11990788 U JP11990788 U JP 11990788U JP 11990788 U JP11990788 U JP 11990788U JP H0242060 U JPH0242060 U JP H0242060U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- cathode
- target
- anode
- sample chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11990788U JPH0242060U (fr) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11990788U JPH0242060U (fr) | 1988-09-14 | 1988-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242060U true JPH0242060U (fr) | 1990-03-23 |
Family
ID=31365549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11990788U Pending JPH0242060U (fr) | 1988-09-14 | 1988-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242060U (fr) |
-
1988
- 1988-09-14 JP JP11990788U patent/JPH0242060U/ja active Pending
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