JPS63147815U - - Google Patents
Info
- Publication number
- JPS63147815U JPS63147815U JP3848987U JP3848987U JPS63147815U JP S63147815 U JPS63147815 U JP S63147815U JP 3848987 U JP3848987 U JP 3848987U JP 3848987 U JP3848987 U JP 3848987U JP S63147815 U JPS63147815 U JP S63147815U
- Authority
- JP
- Japan
- Prior art keywords
- generating apparatus
- light source
- reaction
- etching
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848987U JPS63147815U (fr) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848987U JPS63147815U (fr) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147815U true JPS63147815U (fr) | 1988-09-29 |
Family
ID=30850786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3848987U Pending JPS63147815U (fr) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147815U (fr) |
-
1987
- 1987-03-18 JP JP3848987U patent/JPS63147815U/ja active Pending
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