JPS6231900U - - Google Patents

Info

Publication number
JPS6231900U
JPS6231900U JP12158585U JP12158585U JPS6231900U JP S6231900 U JPS6231900 U JP S6231900U JP 12158585 U JP12158585 U JP 12158585U JP 12158585 U JP12158585 U JP 12158585U JP S6231900 U JPS6231900 U JP S6231900U
Authority
JP
Japan
Prior art keywords
plasma
microwave
plasma processing
plasma generation
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12158585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12158585U priority Critical patent/JPS6231900U/ja
Publication of JPS6231900U publication Critical patent/JPS6231900U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
JP12158585U 1985-08-09 1985-08-09 Pending JPS6231900U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12158585U JPS6231900U (fr) 1985-08-09 1985-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12158585U JPS6231900U (fr) 1985-08-09 1985-08-09

Publications (1)

Publication Number Publication Date
JPS6231900U true JPS6231900U (fr) 1987-02-25

Family

ID=31010996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12158585U Pending JPS6231900U (fr) 1985-08-09 1985-08-09

Country Status (1)

Country Link
JP (1) JPS6231900U (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884431A (ja) * 1981-11-13 1983-05-20 Nec Corp プラズマエツチング装置
JPS6016424A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd マイクロ波プラズマ処理方法及びその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884431A (ja) * 1981-11-13 1983-05-20 Nec Corp プラズマエツチング装置
JPS6016424A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd マイクロ波プラズマ処理方法及びその装置

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