JPS63193832U - - Google Patents

Info

Publication number
JPS63193832U
JPS63193832U JP8369887U JP8369887U JPS63193832U JP S63193832 U JPS63193832 U JP S63193832U JP 8369887 U JP8369887 U JP 8369887U JP 8369887 U JP8369887 U JP 8369887U JP S63193832 U JPS63193832 U JP S63193832U
Authority
JP
Japan
Prior art keywords
plasma processing
microwave
cooling medium
airtight plate
processing furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8369887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8369887U priority Critical patent/JPS63193832U/ja
Publication of JPS63193832U publication Critical patent/JPS63193832U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP8369887U 1987-05-30 1987-05-30 Pending JPS63193832U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8369887U JPS63193832U (fr) 1987-05-30 1987-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8369887U JPS63193832U (fr) 1987-05-30 1987-05-30

Publications (1)

Publication Number Publication Date
JPS63193832U true JPS63193832U (fr) 1988-12-14

Family

ID=30937523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8369887U Pending JPS63193832U (fr) 1987-05-30 1987-05-30

Country Status (1)

Country Link
JP (1) JPS63193832U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02202703A (ja) * 1989-02-01 1990-08-10 Hitachi Ltd マイクロ波整合方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02202703A (ja) * 1989-02-01 1990-08-10 Hitachi Ltd マイクロ波整合方法及び装置

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