JPS63193832U - - Google Patents
Info
- Publication number
- JPS63193832U JPS63193832U JP8369887U JP8369887U JPS63193832U JP S63193832 U JPS63193832 U JP S63193832U JP 8369887 U JP8369887 U JP 8369887U JP 8369887 U JP8369887 U JP 8369887U JP S63193832 U JPS63193832 U JP S63193832U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- microwave
- cooling medium
- airtight plate
- processing furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 3
- 238000012856 packing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8369887U JPS63193832U (fr) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8369887U JPS63193832U (fr) | 1987-05-30 | 1987-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63193832U true JPS63193832U (fr) | 1988-12-14 |
Family
ID=30937523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8369887U Pending JPS63193832U (fr) | 1987-05-30 | 1987-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63193832U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02202703A (ja) * | 1989-02-01 | 1990-08-10 | Hitachi Ltd | マイクロ波整合方法及び装置 |
-
1987
- 1987-05-30 JP JP8369887U patent/JPS63193832U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02202703A (ja) * | 1989-02-01 | 1990-08-10 | Hitachi Ltd | マイクロ波整合方法及び装置 |