JPH0241252U - - Google Patents
Info
- Publication number
- JPH0241252U JPH0241252U JP12011888U JP12011888U JPH0241252U JP H0241252 U JPH0241252 U JP H0241252U JP 12011888 U JP12011888 U JP 12011888U JP 12011888 U JP12011888 U JP 12011888U JP H0241252 U JPH0241252 U JP H0241252U
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- fixing frame
- mask
- mask fixing
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011888U JPH0241252U (pl) | 1988-09-13 | 1988-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011888U JPH0241252U (pl) | 1988-09-13 | 1988-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241252U true JPH0241252U (pl) | 1990-03-22 |
Family
ID=31365941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12011888U Pending JPH0241252U (pl) | 1988-09-13 | 1988-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241252U (pl) |
-
1988
- 1988-09-13 JP JP12011888U patent/JPH0241252U/ja active Pending
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