JPH0314454U - - Google Patents

Info

Publication number
JPH0314454U
JPH0314454U JP7456189U JP7456189U JPH0314454U JP H0314454 U JPH0314454 U JP H0314454U JP 7456189 U JP7456189 U JP 7456189U JP 7456189 U JP7456189 U JP 7456189U JP H0314454 U JPH0314454 U JP H0314454U
Authority
JP
Japan
Prior art keywords
reference frame
substrate
glass substrate
sets
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7456189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0725679Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7456189U priority Critical patent/JPH0725679Y2/ja
Publication of JPH0314454U publication Critical patent/JPH0314454U/ja
Application granted granted Critical
Publication of JPH0725679Y2 publication Critical patent/JPH0725679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7456189U 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台 Expired - Lifetime JPH0725679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7456189U JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7456189U JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Publications (2)

Publication Number Publication Date
JPH0314454U true JPH0314454U (pl) 1991-02-14
JPH0725679Y2 JPH0725679Y2 (ja) 1995-06-07

Family

ID=31614357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7456189U Expired - Lifetime JPH0725679Y2 (ja) 1989-06-26 1989-06-26 ガラス基板検査用フレキシブル載置台

Country Status (1)

Country Link
JP (1) JPH0725679Y2 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1189739C (zh) * 2000-04-26 2005-02-16 奥林巴斯光学工业株式会社 保持架机构
JP4659813B2 (ja) * 2007-12-27 2011-03-30 セイコーエプソン株式会社 表示器用照明装置

Also Published As

Publication number Publication date
JPH0725679Y2 (ja) 1995-06-07

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