JPH0373428U - - Google Patents
Info
- Publication number
- JPH0373428U JPH0373428U JP13505389U JP13505389U JPH0373428U JP H0373428 U JPH0373428 U JP H0373428U JP 13505389 U JP13505389 U JP 13505389U JP 13505389 U JP13505389 U JP 13505389U JP H0373428 U JPH0373428 U JP H0373428U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- exposure apparatus
- calibrator
- exposure
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13505389U JPH0373428U (pl) | 1989-11-20 | 1989-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13505389U JPH0373428U (pl) | 1989-11-20 | 1989-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373428U true JPH0373428U (pl) | 1991-07-24 |
Family
ID=31682344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13505389U Pending JPH0373428U (pl) | 1989-11-20 | 1989-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373428U (pl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007159594A (ja) * | 2003-12-04 | 2007-06-28 | Norihiko Arita | 液体供給機構 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56153740A (en) * | 1981-04-09 | 1981-11-27 | Fujitsu Ltd | Calibrating method for mask |
| JPS56169330A (en) * | 1980-05-31 | 1981-12-26 | Toshiba Corp | Clearance providing device |
| JPS59161820A (ja) * | 1983-03-07 | 1984-09-12 | Toshiba Corp | マスク合せ装置 |
-
1989
- 1989-11-20 JP JP13505389U patent/JPH0373428U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56169330A (en) * | 1980-05-31 | 1981-12-26 | Toshiba Corp | Clearance providing device |
| JPS56153740A (en) * | 1981-04-09 | 1981-11-27 | Fujitsu Ltd | Calibrating method for mask |
| JPS59161820A (ja) * | 1983-03-07 | 1984-09-12 | Toshiba Corp | マスク合せ装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007159594A (ja) * | 2003-12-04 | 2007-06-28 | Norihiko Arita | 液体供給機構 |
| JP4603004B2 (ja) * | 2003-12-04 | 2010-12-22 | 典彦 有田 | 液体供給機構 |