JPH0279022U - - Google Patents
Info
- Publication number
- JPH0279022U JPH0279022U JP15957588U JP15957588U JPH0279022U JP H0279022 U JPH0279022 U JP H0279022U JP 15957588 U JP15957588 U JP 15957588U JP 15957588 U JP15957588 U JP 15957588U JP H0279022 U JPH0279022 U JP H0279022U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film sheet
- exposure
- exposure assembly
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15957588U JPH0279022U (pl) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15957588U JPH0279022U (pl) | 1988-12-08 | 1988-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279022U true JPH0279022U (pl) | 1990-06-18 |
Family
ID=31440910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15957588U Pending JPH0279022U (pl) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279022U (pl) |
-
1988
- 1988-12-08 JP JP15957588U patent/JPH0279022U/ja active Pending