JPS61192445U - - Google Patents
Info
- Publication number
- JPS61192445U JPS61192445U JP1985076988U JP7698885U JPS61192445U JP S61192445 U JPS61192445 U JP S61192445U JP 1985076988 U JP1985076988 U JP 1985076988U JP 7698885 U JP7698885 U JP 7698885U JP S61192445 U JPS61192445 U JP S61192445U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- mask
- defect inspection
- range
- movement mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 230000007547 defect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985076988U JPS61192445U (pl) | 1985-05-22 | 1985-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985076988U JPS61192445U (pl) | 1985-05-22 | 1985-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61192445U true JPS61192445U (pl) | 1986-11-29 |
Family
ID=30619636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985076988U Pending JPS61192445U (pl) | 1985-05-22 | 1985-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61192445U (pl) |
-
1985
- 1985-05-22 JP JP1985076988U patent/JPS61192445U/ja active Pending
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