JPH0241164Y2 - - Google Patents

Info

Publication number
JPH0241164Y2
JPH0241164Y2 JP10258884U JP10258884U JPH0241164Y2 JP H0241164 Y2 JPH0241164 Y2 JP H0241164Y2 JP 10258884 U JP10258884 U JP 10258884U JP 10258884 U JP10258884 U JP 10258884U JP H0241164 Y2 JPH0241164 Y2 JP H0241164Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
vacuum
container
vacuum container
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10258884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120557U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10258884U priority Critical patent/JPS6120557U/ja
Publication of JPS6120557U publication Critical patent/JPS6120557U/ja
Application granted granted Critical
Publication of JPH0241164Y2 publication Critical patent/JPH0241164Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10258884U 1984-07-05 1984-07-05 蒸着装置 Granted JPS6120557U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10258884U JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10258884U JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Publications (2)

Publication Number Publication Date
JPS6120557U JPS6120557U (ja) 1986-02-06
JPH0241164Y2 true JPH0241164Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-01

Family

ID=30661984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10258884U Granted JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Country Status (1)

Country Link
JP (1) JPS6120557U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6120557U (ja) 1986-02-06

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