JPH0241164B2 - - Google Patents
Info
- Publication number
- JPH0241164B2 JPH0241164B2 JP56085233A JP8523381A JPH0241164B2 JP H0241164 B2 JPH0241164 B2 JP H0241164B2 JP 56085233 A JP56085233 A JP 56085233A JP 8523381 A JP8523381 A JP 8523381A JP H0241164 B2 JPH0241164 B2 JP H0241164B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- growth
- chamber
- cassette
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56085233A JPS57199218A (en) | 1981-06-01 | 1981-06-01 | Morecular beam epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56085233A JPS57199218A (en) | 1981-06-01 | 1981-06-01 | Morecular beam epitaxial growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57199218A JPS57199218A (en) | 1982-12-07 |
| JPH0241164B2 true JPH0241164B2 (enExample) | 1990-09-14 |
Family
ID=13852839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56085233A Granted JPS57199218A (en) | 1981-06-01 | 1981-06-01 | Morecular beam epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57199218A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6097621A (ja) * | 1983-11-02 | 1985-05-31 | Hitachi Ltd | 分子線エピタキシ装置における基板搬送装置 |
| JPS60117615A (ja) * | 1983-11-30 | 1985-06-25 | Hitachi Ltd | 分子線エピタキシ装置 |
| JPS60117614A (ja) * | 1983-11-30 | 1985-06-25 | Hitachi Ltd | 分子線エピタキシ装置 |
-
1981
- 1981-06-01 JP JP56085233A patent/JPS57199218A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57199218A (en) | 1982-12-07 |
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