JPH0239551Y2 - - Google Patents

Info

Publication number
JPH0239551Y2
JPH0239551Y2 JP16366886U JP16366886U JPH0239551Y2 JP H0239551 Y2 JPH0239551 Y2 JP H0239551Y2 JP 16366886 U JP16366886 U JP 16366886U JP 16366886 U JP16366886 U JP 16366886U JP H0239551 Y2 JPH0239551 Y2 JP H0239551Y2
Authority
JP
Japan
Prior art keywords
chamber
passage
feed
port
feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16366886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16366886U priority Critical patent/JPH0239551Y2/ja
Publication of JPS6369537U publication Critical patent/JPS6369537U/ja
Application granted granted Critical
Publication of JPH0239551Y2 publication Critical patent/JPH0239551Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Glanulating (AREA)
JP16366886U 1986-10-25 1986-10-25 Expired JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16366886U JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-25 1986-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16366886U JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-25 1986-10-25

Publications (2)

Publication Number Publication Date
JPS6369537U JPS6369537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-10
JPH0239551Y2 true JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-23

Family

ID=31092079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16366886U Expired JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-25 1986-10-25

Country Status (1)

Country Link
JP (1) JPH0239551Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6369537U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-10

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