JPH0237764Y2 - - Google Patents

Info

Publication number
JPH0237764Y2
JPH0237764Y2 JP15403184U JP15403184U JPH0237764Y2 JP H0237764 Y2 JPH0237764 Y2 JP H0237764Y2 JP 15403184 U JP15403184 U JP 15403184U JP 15403184 U JP15403184 U JP 15403184U JP H0237764 Y2 JPH0237764 Y2 JP H0237764Y2
Authority
JP
Japan
Prior art keywords
enclosure
air
clean
clean air
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15403184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6168005U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15403184U priority Critical patent/JPH0237764Y2/ja
Publication of JPS6168005U publication Critical patent/JPS6168005U/ja
Application granted granted Critical
Publication of JPH0237764Y2 publication Critical patent/JPH0237764Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP15403184U 1984-10-11 1984-10-11 Expired JPH0237764Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (enEXAMPLES) 1984-10-11 1984-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (enEXAMPLES) 1984-10-11 1984-10-11

Publications (2)

Publication Number Publication Date
JPS6168005U JPS6168005U (enEXAMPLES) 1986-05-09
JPH0237764Y2 true JPH0237764Y2 (enEXAMPLES) 1990-10-12

Family

ID=30712025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15403184U Expired JPH0237764Y2 (enEXAMPLES) 1984-10-11 1984-10-11

Country Status (1)

Country Link
JP (1) JPH0237764Y2 (enEXAMPLES)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338163Y2 (enEXAMPLES) * 1986-06-10 1991-08-13
JPH0318406Y2 (enEXAMPLES) * 1986-09-17 1991-04-18
JPH0318407Y2 (enEXAMPLES) * 1986-09-17 1991-04-18

Also Published As

Publication number Publication date
JPS6168005U (enEXAMPLES) 1986-05-09

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