JPH0237338U - - Google Patents
Info
- Publication number
- JPH0237338U JPH0237338U JP11630188U JP11630188U JPH0237338U JP H0237338 U JPH0237338 U JP H0237338U JP 11630188 U JP11630188 U JP 11630188U JP 11630188 U JP11630188 U JP 11630188U JP H0237338 U JPH0237338 U JP H0237338U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum chamber
- component
- mirror
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
Description
第１図は本考案の実施例の構成図、第２図は真
空蒸着装置のるつぼ温度温度測定に放射温度計を
用いた場合の一般的な構成例を示す図である。
１……真空チヤンバ、２……るつぼ、５……鏡
、６……イオン銃。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a diagram showing a general configuration example when a radiation thermometer is used to measure the crucible temperature of a vacuum evaporation apparatus. 1... Vacuum chamber, 2... Crucible, 5... Mirror, 6... Ion gun.
Claims (1)
チヤンバ内部に配設された鏡により外部の放射温
度計に導くことによつて、その部品温度を測定す
る装置において、上記鏡の反射面に加速された粒
子を照射する手段を備えていることを特徴とする
、真空チヤンバ用温度測定装置。 In a device that measures the temperature of a component in a vacuum chamber by guiding light from thermal radiation from a component inside the chamber to an external radiation thermometer using a mirror disposed inside the chamber, the light is accelerated by the reflective surface of the mirror. 1. A temperature measuring device for a vacuum chamber, comprising means for irradiating particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630188U JPH0237338U (en) | 1988-09-02 | 1988-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11630188U JPH0237338U (en) | 1988-09-02 | 1988-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0237338U true JPH0237338U (en) | 1990-03-12 |
Family
ID=31358715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11630188U Pending JPH0237338U (en) | 1988-09-02 | 1988-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237338U (en) |
-
1988
- 1988-09-02 JP JP11630188U patent/JPH0237338U/ja active Pending
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