JPH0381527U - - Google Patents
Info
- Publication number
- JPH0381527U JPH0381527U JP14202389U JP14202389U JPH0381527U JP H0381527 U JPH0381527 U JP H0381527U JP 14202389 U JP14202389 U JP 14202389U JP 14202389 U JP14202389 U JP 14202389U JP H0381527 U JPH0381527 U JP H0381527U
- Authority
- JP
- Japan
- Prior art keywords
- shaped hood
- measurement probe
- radiation thermometer
- diagram showing
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例の計測用プローブを示
す図、第２図は黒体の温度と放射エネルギーの波
長分布を示す図、第３図はインライン型スパツタ
装置に本考案の実施例をセツトした状態を示す図
、第４図は本考案の実施例の効果を説明するため
の図、第５図は従来の放射温度計を示す図、第６
図は従来の放射温度計の計測用プローブを示す図
、第７図は従来の放射温度計の使用状態を示す図
、第８図は考案が解決しようとする課題を説明す
るための図である。
図において、１は金属ベローズ（覆い）、２は
フアイバ、３は計測用プローブ、７はレンズ、８
は保護板、９はＬ型フード、１４は光を吸収する
物質、１５は冷却パイプを示す。
Fig. 1 is a diagram showing a measurement probe according to an embodiment of the present invention, Fig. 2 is a diagram showing the temperature of a black body and the wavelength distribution of radiant energy, and Fig. 3 is a diagram showing an embodiment of the present invention applied to an in-line sputtering device. FIG. 4 is a diagram for explaining the effect of the embodiment of the present invention, FIG. 5 is a diagram showing a conventional radiation thermometer, and FIG. 6 is a diagram showing the set state.
Figure 7 shows a measurement probe of a conventional radiation thermometer, Figure 7 shows how the conventional radiation thermometer is used, and Figure 8 explains the problem that the invention aims to solve. . In the figure, 1 is a metal bellows (cover), 2 is a fiber, 3 is a measurement probe, 7 is a lens, and 8
9 is a protection plate, 9 is an L-shaped hood, 14 is a light absorbing substance, and 15 is a cooling pipe.
Claims (1)
３を先端に備えたフアイバ２を用いた放射温度計
において、 上記Ｌ型フード９の内壁に光を吸収する物質１
４を被覆し、且つ該Ｌ型フード９及び該Ｌ型フー
ド内のミラー１０を冷却する冷却手段を設けたこ
とを特徴とする放射温度計。[Claims for Utility Model Registration] In a radiation thermometer using a fiber 2 having an L-shaped hood 9 and having an infrared measurement probe 3 at its tip, a light-absorbing substance 1 on the inner wall of the L-shaped hood 9.
4, and is provided with a cooling means for cooling the L-shaped hood 9 and the mirror 10 inside the L-shaped hood.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202389U JPH0381527U (en) | 1989-12-11 | 1989-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202389U JPH0381527U (en) | 1989-12-11 | 1989-12-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0381527U true JPH0381527U (en) | 1991-08-20 |
Family
ID=31688876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14202389U Pending JPH0381527U (en) | 1989-12-11 | 1989-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0381527U (en) |
-
1989
- 1989-12-11 JP JP14202389U patent/JPH0381527U/ja active Pending
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