JPH01130252U - - Google Patents

Info

Publication number
JPH01130252U
JPH01130252U JP2627888U JP2627888U JPH01130252U JP H01130252 U JPH01130252 U JP H01130252U JP 2627888 U JP2627888 U JP 2627888U JP 2627888 U JP2627888 U JP 2627888U JP H01130252 U JPH01130252 U JP H01130252U
Authority
JP
Japan
Prior art keywords
ray intensity
measuring device
ray
ion
intensity measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2627888U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2627888U priority Critical patent/JPH01130252U/ja
Publication of JPH01130252U publication Critical patent/JPH01130252U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、実施例に係るイオン処理装置を部分
的に示す概略図である。第2図は、従来のイオン
処理装置の一例を部分的に示す概略図である。 8……イオン源、10,10′……イオンビー
ム、12……質量分析器、14……加速管、16
……X線、18……X線強度測定器、20……比
較器。
FIG. 1 is a schematic diagram partially showing an ion processing apparatus according to an embodiment. FIG. 2 is a schematic diagram partially showing an example of a conventional ion processing apparatus. 8...Ion source, 10,10'...Ion beam, 12...Mass spectrometer, 14...Acceleration tube, 16
... X-ray, 18 ... X-ray intensity measuring device, 20 ... Comparator.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] イオン源から引き出したイオンビームを質量分
析器および加速管内を通してターゲツトに導くよ
う構成されたイオン処理装置において、そのX線
発生個所の方に向けてX線強度を測定するX線強
度測定器を配置し、かつこのX線強度測定器によ
つて測定したX線強度を基準値と比較する比較器
を設けたことを特徴とするイオン処理装置。
In an ion processing device configured to guide an ion beam extracted from an ion source to a target through a mass spectrometer and an acceleration tube, an X-ray intensity measuring device is placed toward the X-ray generation location to measure the X-ray intensity. and a comparator for comparing the X-ray intensity measured by the X-ray intensity measuring device with a reference value.
JP2627888U 1988-02-29 1988-02-29 Pending JPH01130252U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2627888U JPH01130252U (en) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2627888U JPH01130252U (en) 1988-02-29 1988-02-29

Publications (1)

Publication Number Publication Date
JPH01130252U true JPH01130252U (en) 1989-09-05

Family

ID=31247761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2627888U Pending JPH01130252U (en) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH01130252U (en)

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