JPH01130252U - - Google Patents
Info
- Publication number
- JPH01130252U JPH01130252U JP2627888U JP2627888U JPH01130252U JP H01130252 U JPH01130252 U JP H01130252U JP 2627888 U JP2627888 U JP 2627888U JP 2627888 U JP2627888 U JP 2627888U JP H01130252 U JPH01130252 U JP H01130252U
- Authority
- JP
- Japan
- Prior art keywords
- ray intensity
- measuring device
- ray
- ion
- intensity measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は、実施例に係るイオン処理装置を部分
的に示す概略図である。第２図は、従来のイオン
処理装置の一例を部分的に示す概略図である。
８……イオン源、１０，１０′……イオンビー
ム、１２……質量分析器、１４……加速管、１６
……Ｘ線、１８……Ｘ線強度測定器、２０……比
較器。
FIG. 1 is a schematic diagram partially showing an ion processing apparatus according to an embodiment. FIG. 2 is a schematic diagram partially showing an example of a conventional ion processing apparatus. 8...Ion source, 10,10'...Ion beam, 12...Mass spectrometer, 14...Acceleration tube, 16
... X-ray, 18 ... X-ray intensity measuring device, 20 ... Comparator.
Claims (1)
析器および加速管内を通してターゲツトに導くよ
う構成されたイオン処理装置において、そのＸ線
発生個所の方に向けてＸ線強度を測定するＸ線強
度測定器を配置し、かつこのＸ線強度測定器によ
つて測定したＸ線強度を基準値と比較する比較器
を設けたことを特徴とするイオン処理装置。 In an ion processing device configured to guide an ion beam extracted from an ion source to a target through a mass spectrometer and an acceleration tube, an X-ray intensity measuring device is placed toward the X-ray generation location to measure the X-ray intensity. and a comparator for comparing the X-ray intensity measured by the X-ray intensity measuring device with a reference value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2627888U JPH01130252U (en) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2627888U JPH01130252U (en) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130252U true JPH01130252U (en) | 1989-09-05 |
Family
ID=31247761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2627888U Pending JPH01130252U (en) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130252U (en) |
-
1988
- 1988-02-29 JP JP2627888U patent/JPH01130252U/ja active Pending
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