JPS61168634U - - Google Patents
Info
- Publication number
- JPS61168634U JPS61168634U JP5261485U JP5261485U JPS61168634U JP S61168634 U JPS61168634 U JP S61168634U JP 5261485 U JP5261485 U JP 5261485U JP 5261485 U JP5261485 U JP 5261485U JP S61168634 U JPS61168634 U JP S61168634U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- etching
- end point
- outputting
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、この考案に係るエツチング終了点検
出装置を示すブロツク図である。第２図は、この
考案の背景を成すエツチング装置を示す概略図で
ある。第３図は、第２図のエツチング装置におけ
るビームエネルギーの時間的変化の一例を示す図
である。第４図は、エツチング装置におけるラジ
カルの発光強度の時間的変化の一例を示す図であ
る。第５図は、従来のエツチング装置におけるビ
ームエネルギーの時間的変化を示す図である。
２０…イオン源、２６…イオンビーム、３２…
試料（ウエハ）、５０…制御装置、１０１…測定
回路、１０２…積分回路、１０３…基準値発生回
路、１０４…比較回路。
FIG. 1 is a block diagram showing an etching end point detection device according to this invention. FIG. 2 is a schematic diagram showing an etching device that forms the background of this invention. FIG. 3 is a diagram showing an example of a temporal change in beam energy in the etching apparatus shown in FIG. FIG. 4 is a diagram showing an example of a temporal change in the emission intensity of radicals in an etching apparatus. FIG. 5 is a diagram showing temporal changes in beam energy in a conventional etching apparatus. 20...Ion source, 26...Ion beam, 32...
Sample (wafer), 50...Control device, 101...Measurement circuit, 102...Integrator circuit, 103...Reference value generation circuit, 104...Comparison circuit.
Claims (1)
チングするエツチング装置に用いられて試料のエ
ツチング終了点を検出するものにおいて、 試料をエツチングするものに寄与するイオンビ
ームの所定の物理量を測定する測定手段と、 測定手段で測定した物理量を実時間で積分して
積分値を出力する積分手段と、 試料のエツチング開始から終了に至るまでに要
する前記物理量の積分値を基準値として出力する
基準値発生手段と、 積分手段からの積分値と基準値発生手段からの
基準値を比較して両者の一致を検出する比較手段
とを備えることを特徴とするエツチング終了点検
出装置。[Scope of Claim for Utility Model Registration] In an etching device that etches a sample by irradiating the sample with an ion beam to detect the etching end point of the sample, a predetermined amount of the ion beam that contributes to etching the sample. a measuring means for measuring a physical quantity; an integrating means for integrating the physical quantity measured by the measuring means in real time and outputting an integral value; 1. An etching end point detecting device comprising: a reference value generating means for outputting an etching end point as shown in FIG.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5261485U JPS61168634U (en) | 1985-04-08 | 1985-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5261485U JPS61168634U (en) | 1985-04-08 | 1985-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61168634U true JPS61168634U (en) | 1986-10-20 |
Family
ID=30572727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5261485U Pending JPS61168634U (en) | 1985-04-08 | 1985-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61168634U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6470024A (en) * | 1987-03-05 | 1989-03-15 | Terumo Corp | Cardiac output measuring apparatus equipped with automatic starting function of measurement |
-
1985
- 1985-04-08 JP JP5261485U patent/JPS61168634U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6470024A (en) * | 1987-03-05 | 1989-03-15 | Terumo Corp | Cardiac output measuring apparatus equipped with automatic starting function of measurement |
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