JPH01165559U - - Google Patents
Info
- Publication number
- JPH01165559U JPH01165559U JP6107388U JP6107388U JPH01165559U JP H01165559 U JPH01165559 U JP H01165559U JP 6107388 U JP6107388 U JP 6107388U JP 6107388 U JP6107388 U JP 6107388U JP H01165559 U JPH01165559 U JP H01165559U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ray
- heating source
- energy
- analyzes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本案の一実施例の電子顕微鏡の試料室
近傍の断面図である。
１…試料室、２…その真空排気システム、３…
電子レンズ、４…電子ビーム、５…試料、６…Ｘ
線、７…Ｘ線検出器、８…検出器ベース、９…ヒ
ーター、１０…電源、１１…熱電対。
FIG. 1 is a sectional view of the vicinity of a sample chamber of an electron microscope according to an embodiment of the present invention. 1...sample chamber, 2...its vacuum evacuation system, 3...
Electron lens, 4...electron beam, 5...sample, 6...X
ray, 7...X-ray detector, 8...detector base, 9...heater, 10...power supply, 11...thermocouple.
Claims (1)
線のエネルギーで試料の分析を行なうエネルギー
分散形Ｘ線分析装置を装着した電子顕微鏡におい
て、Ｘ線検出器のベースに加熱源と該加熱源の温
度制御装置を設けたことを特徴とする電子顕微鏡
あるいは類似装置。 When a sample is irradiated with an electron beam, the X generated from the sample
An electron microscope equipped with an energy dispersive X-ray analyzer that analyzes a sample using ray energy, characterized in that the base of the X-ray detector is provided with a heating source and a temperature control device for the heating source. Or similar devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6107388U JPH01165559U (en) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6107388U JPH01165559U (en) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165559U true JPH01165559U (en) | 1989-11-20 |
Family
ID=31286750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6107388U Pending JPH01165559U (en) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165559U (en) |
-
1988
- 1988-05-11 JP JP6107388U patent/JPH01165559U/ja active Pending