JPH02371A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPH02371A
JPH02371A JP63121705A JP12170588A JPH02371A JP H02371 A JPH02371 A JP H02371A JP 63121705 A JP63121705 A JP 63121705A JP 12170588 A JP12170588 A JP 12170588A JP H02371 A JPH02371 A JP H02371A
Authority
JP
Japan
Prior art keywords
circuit
gate
voltage
region
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63121705A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368543B2 (en, 2012
Inventor
Yuji Tanida
谷田　雄二
Takaaki Hagiwara
萩原　隆旦
Ryuji Kondo
近藤　隆二
Shinichi Minami
真一 南
Yokichi Ito
伊藤　容吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63121705A priority Critical patent/JPH02371A/ja
Publication of JPH02371A publication Critical patent/JPH02371A/ja
Publication of JPH0368543B2 publication Critical patent/JPH0368543B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP63121705A 1988-05-20 1988-05-20 半導体装置の製造方法 Granted JPH02371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63121705A JPH02371A (ja) 1988-05-20 1988-05-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63121705A JPH02371A (ja) 1988-05-20 1988-05-20 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP6394179A Division JPS55156370A (en) 1979-05-25 1979-05-25 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPH02371A true JPH02371A (ja) 1990-01-05
JPH0368543B2 JPH0368543B2 (en, 2012) 1991-10-28

Family

ID=14817842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63121705A Granted JPH02371A (ja) 1988-05-20 1988-05-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH02371A (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004342720A (ja) * 2003-05-14 2004-12-02 Seiko Epson Corp 不揮発性記憶装置を含む半導体装置
JP2010056573A (ja) * 2009-12-07 2010-03-11 Seiko Epson Corp 不揮発性記憶装置を含む半導体装置
JP2011071343A (ja) * 2009-09-25 2011-04-07 Toshiba Corp 半導体記憶装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004342720A (ja) * 2003-05-14 2004-12-02 Seiko Epson Corp 不揮発性記憶装置を含む半導体装置
JP2011071343A (ja) * 2009-09-25 2011-04-07 Toshiba Corp 半導体記憶装置
US8334557B2 (en) 2009-09-25 2012-12-18 Kabushiki Kaisha Toshiba Nonvolatile semiconductor storage device including a transfer transistor
JP2010056573A (ja) * 2009-12-07 2010-03-11 Seiko Epson Corp 不揮発性記憶装置を含む半導体装置

Also Published As

Publication number Publication date
JPH0368543B2 (en, 2012) 1991-10-28

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