JPH0237105Y2 - - Google Patents
Info
- Publication number
- JPH0237105Y2 JPH0237105Y2 JP1988148412U JP14841288U JPH0237105Y2 JP H0237105 Y2 JPH0237105 Y2 JP H0237105Y2 JP 1988148412 U JP1988148412 U JP 1988148412U JP 14841288 U JP14841288 U JP 14841288U JP H0237105 Y2 JPH0237105 Y2 JP H0237105Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- alarm
- semiconductor
- control device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 20
- 229910000077 silane Inorganic materials 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 7
- 230000002265 prevention Effects 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 2
- 231100000331 toxic Toxicity 0.000 claims description 2
- 230000002588 toxic effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 43
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000001784 detoxification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Fire-Detection Mechanisms (AREA)
- Emergency Alarm Devices (AREA)
- Fire Alarms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988148412U JPH0237105Y2 (de) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988148412U JPH0237105Y2 (de) | 1988-11-16 | 1988-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184186U JPH0184186U (de) | 1989-06-05 |
| JPH0237105Y2 true JPH0237105Y2 (de) | 1990-10-08 |
Family
ID=31419715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988148412U Expired JPH0237105Y2 (de) | 1988-11-16 | 1988-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237105Y2 (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5396895A (en) * | 1977-02-03 | 1978-08-24 | Nitto Electric Ind Co | Gas sensor element |
| JPS553510A (en) * | 1978-06-21 | 1980-01-11 | Yasunori Nagao | Inner cylinder for rotary incinerator |
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
-
1988
- 1988-11-16 JP JP1988148412U patent/JPH0237105Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5396895A (en) * | 1977-02-03 | 1978-08-24 | Nitto Electric Ind Co | Gas sensor element |
| JPS553510A (en) * | 1978-06-21 | 1980-01-11 | Yasunori Nagao | Inner cylinder for rotary incinerator |
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0184186U (de) | 1989-06-05 |
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