JPH0236666Y2 - - Google Patents
Info
- Publication number
- JPH0236666Y2 JPH0236666Y2 JP1985126523U JP12652385U JPH0236666Y2 JP H0236666 Y2 JPH0236666 Y2 JP H0236666Y2 JP 1985126523 U JP1985126523 U JP 1985126523U JP 12652385 U JP12652385 U JP 12652385U JP H0236666 Y2 JPH0236666 Y2 JP H0236666Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- shaft
- connecting shaft
- fixed
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 18
- 239000000428 dust Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Reciprocating Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985126523U JPH0236666Y2 (cs) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985126523U JPH0236666Y2 (cs) | 1985-08-21 | 1985-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6235741U JPS6235741U (cs) | 1987-03-03 |
| JPH0236666Y2 true JPH0236666Y2 (cs) | 1990-10-04 |
Family
ID=31020402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985126523U Expired JPH0236666Y2 (cs) | 1985-08-21 | 1985-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0236666Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5029265U (cs) * | 1973-07-12 | 1975-04-03 | ||
| JPS53111965A (en) * | 1977-03-11 | 1978-09-29 | Kouichi Shimizu | Apparatus for taking out products |
-
1985
- 1985-08-21 JP JP1985126523U patent/JPH0236666Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5029265U (cs) * | 1973-07-12 | 1975-04-03 | ||
| JPS53111965A (en) * | 1977-03-11 | 1978-09-29 | Kouichi Shimizu | Apparatus for taking out products |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6235741U (cs) | 1987-03-03 |
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