JPH0233350U - - Google Patents
Info
- Publication number
- JPH0233350U JPH0233350U JP11307588U JP11307588U JPH0233350U JP H0233350 U JPH0233350 U JP H0233350U JP 11307588 U JP11307588 U JP 11307588U JP 11307588 U JP11307588 U JP 11307588U JP H0233350 U JPH0233350 U JP H0233350U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- evacuation system
- ray
- standing wave
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988113075U JPH0714874Y2 (ja) | 1988-08-29 | 1988-08-29 | 真空用x線定在波測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988113075U JPH0714874Y2 (ja) | 1988-08-29 | 1988-08-29 | 真空用x線定在波測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233350U true JPH0233350U (enExample) | 1990-03-02 |
| JPH0714874Y2 JPH0714874Y2 (ja) | 1995-04-10 |
Family
ID=31352594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988113075U Expired - Lifetime JPH0714874Y2 (ja) | 1988-08-29 | 1988-08-29 | 真空用x線定在波測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714874Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62226048A (ja) * | 1986-03-28 | 1987-10-05 | Toshiba Corp | 結晶固体の分光分析方法 |
| JPS63142811A (ja) * | 1986-12-05 | 1988-06-15 | Nec Corp | 界面超構造の製造方法 |
-
1988
- 1988-08-29 JP JP1988113075U patent/JPH0714874Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62226048A (ja) * | 1986-03-28 | 1987-10-05 | Toshiba Corp | 結晶固体の分光分析方法 |
| JPS63142811A (ja) * | 1986-12-05 | 1988-06-15 | Nec Corp | 界面超構造の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0714874Y2 (ja) | 1995-04-10 |
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