JPH0233350U

JPH0233350U -

Info

Publication number: JPH0233350U
Application number: JP11307588U
Authority: JP
Priority date: 1988-08-29
Filing date: 1988-08-29
Publication date: 1990-03-02
Anticipated expiration: 2003-08-29
Also published as: JPH0714874Y2

Description

[Brief explanation of the drawing]

第１図は本考案の第１の実施例を示す概念図、
第２図は本考案の第１の実施例の回転軸に関する
構造概念図、第３図は本考案によるＸ線定在波測
定の一例を示す図、第４図は本考案の第２の実施
例の排気系に関する構造概念図、第５図は従来例
を説明する図である。１……Ｘ線源、２……平行化用スリツト、３…
…非対称モノクロメーター、４……スリツト、５
……試料、６……半導体検出器、７……Ｂｒａｇ
ｇ反射測定用検出器、８……入射Ｘ線強度測定用
検出器、９……高精度ゴニオメーター、１０……
真空槽、１１……回転駆動機構、１２……試料、
１３……フランジにＢｅ窓を設けた入射窓、１４
……フランジにＢｅ窓を設けた出射窓、１５……
蛍光Ｘ線検出用半導体検出器、１６……Ｘ線源、
１７……Ｂｒａｇｇ反射Ｘ線測定用シンチレーシ
ヨンカウンター、１８……真空槽、１９……ベロ
ーズ、２０……真空槽の外壁、２１，２２，２３
……シール材、２４……差動排気ダクト、２５…
…差動排気用排気系、２６……差動排気ダクト、
２７……差動排気用排気系、２８……駆動軸の回
転軸受、２９……回転用駆動軸、３０……粗動回
転ステージ、３１……高精度微動回転ステージ、
３２……試料支持台、３３……試料、３４……真
空槽、３５……荒引排気系、３６……高真空無振
動排気系、３７……回転軸、３８，３９，４０…
…シール材、４１，４２……無振動排気系、４３
，４４，４５……真空バルブ。 FIG. 1 is a conceptual diagram showing the first embodiment of the present invention;
Figure 2 is a structural conceptual diagram of the rotating shaft of the first embodiment of the present invention, Figure 3 is a diagram showing an example of X-ray standing wave measurement according to the present invention, and Figure 4 is the second embodiment of the present invention. FIG. 5 is a structural conceptual diagram of an example exhaust system, and is a diagram illustrating a conventional example. 1... X-ray source, 2... Parallelizing slit, 3...
...Asymmetrical monochromator, 4...Slit, 5
...Sample, 6...Semiconductor detector, 7...Brag
g Detector for reflection measurement, 8...Detector for measuring incident X-ray intensity, 9...High precision goniometer, 10...
Vacuum chamber, 11... Rotation drive mechanism, 12... Sample,
13...Incidence window with Be window provided on the flange, 14
...Output window with a Be window on the flange, 15...
Semiconductor detector for fluorescent X-ray detection, 16...X-ray source,
17...Scintillation counter for Bragg reflection X-ray measurement, 18...Vacuum chamber, 19...Bellows, 20...Outer wall of vacuum chamber, 21, 22, 23
...Sealing material, 24...Differential exhaust duct, 25...
...Exhaust system for differential exhaust, 26...Differential exhaust duct,
27...Exhaust system for differential exhaust, 28...Rotation bearing for drive shaft, 29...Rotation drive shaft, 30...Coarse movement rotation stage, 31...High precision fine movement rotation stage,
32... Sample support stand, 33... Sample, 34... Vacuum chamber, 35... Rough evacuation system, 36... High vacuum vibrationless exhaust system, 37... Rotating shaft, 38, 39, 40...
...Sealing material, 41, 42...Vibrationless exhaust system, 43
, 44, 45...vacuum valve.

Claims

[Claims for Utility Model Registration] (1) An X-ray source, a vacuum container, an X-ray entrance/exit window in the vacuum container, and a device for extracting fluorescent X-rays from a sample placed in the vacuum container. In an apparatus consisting of a fluorescent X-ray detector and a Bragg reflection detector, in order to rotate the sample within a vacuum container with high precision, A sample support stand is provided at the tip on the vacuum side, a high-precision rotary drive mechanism is connected to the atmosphere side, and a plurality of sealing parts are provided between the vacuum container and the rotating shaft, and a space is partitioned by the sealing parts. An X-ray standing wave measuring device for vacuum use, characterized in that a differential pumping mechanism is connected to the vacuum X-ray standing wave measuring device. (2) A rough evacuation system capable of exhausting air from the atmosphere and a vibration-free high vacuum evacuation system, the rough evacuation system and the high vacuum evacuation system being connected by a vacuum valve,
2. The vacuum X-ray standing wave measurement apparatus according to claim 1, wherein a rough evacuation system is used to open and close the vacuum valve to evacuate air from the atmosphere, and a high vacuum evacuation system is used for high vacuum.