JPH023302B2 - - Google Patents

Info

Publication number
JPH023302B2
JPH023302B2 JP60120366A JP12036685A JPH023302B2 JP H023302 B2 JPH023302 B2 JP H023302B2 JP 60120366 A JP60120366 A JP 60120366A JP 12036685 A JP12036685 A JP 12036685A JP H023302 B2 JPH023302 B2 JP H023302B2
Authority
JP
Japan
Prior art keywords
movable beam
film
semiconductor device
substrate
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60120366A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61105861A (ja
Inventor
Shigeo Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP60120366A priority Critical patent/JPS61105861A/ja
Publication of JPS61105861A publication Critical patent/JPS61105861A/ja
Publication of JPH023302B2 publication Critical patent/JPH023302B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP60120366A 1985-06-05 1985-06-05 梁構造体を有する半導体装置 Granted JPS61105861A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60120366A JPS61105861A (ja) 1985-06-05 1985-06-05 梁構造体を有する半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60120366A JPS61105861A (ja) 1985-06-05 1985-06-05 梁構造体を有する半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58163270A Division JPS6055655A (ja) 1983-09-07 1983-09-07 梁構造体を有する半導体装置

Publications (2)

Publication Number Publication Date
JPS61105861A JPS61105861A (ja) 1986-05-23
JPH023302B2 true JPH023302B2 (enExample) 1990-01-23

Family

ID=14784416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60120366A Granted JPS61105861A (ja) 1985-06-05 1985-06-05 梁構造体を有する半導体装置

Country Status (1)

Country Link
JP (1) JPS61105861A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19961299B4 (de) * 1999-12-18 2009-04-30 Robert Bosch Gmbh Sensor zur Erkennung des Klopfens bei einer Brennkraftmaschine
EP1469701B1 (en) * 2000-08-11 2008-04-16 Knowles Electronics, LLC Raised microstructures

Also Published As

Publication number Publication date
JPS61105861A (ja) 1986-05-23

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