JPH0232119B2 - - Google Patents

Info

Publication number
JPH0232119B2
JPH0232119B2 JP60180743A JP18074385A JPH0232119B2 JP H0232119 B2 JPH0232119 B2 JP H0232119B2 JP 60180743 A JP60180743 A JP 60180743A JP 18074385 A JP18074385 A JP 18074385A JP H0232119 B2 JPH0232119 B2 JP H0232119B2
Authority
JP
Japan
Prior art keywords
holding
workpiece
actuator
holding member
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60180743A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244387A (ja
Inventor
Shigeru Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18074385A priority Critical patent/JPS6244387A/ja
Publication of JPS6244387A publication Critical patent/JPS6244387A/ja
Publication of JPH0232119B2 publication Critical patent/JPH0232119B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP18074385A 1985-08-16 1985-08-16 保持機構 Granted JPS6244387A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18074385A JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18074385A JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Publications (2)

Publication Number Publication Date
JPS6244387A JPS6244387A (ja) 1987-02-26
JPH0232119B2 true JPH0232119B2 (enExample) 1990-07-18

Family

ID=16088534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18074385A Granted JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Country Status (1)

Country Link
JP (1) JPS6244387A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002141395A (ja) * 2000-11-02 2002-05-17 Assist Japan Kk 基板保持における基板有無確認方法及び装置
JP4596361B2 (ja) * 2005-01-25 2010-12-08 株式会社安川電機 ウェハのアライナー装置
JP2008080458A (ja) * 2006-09-28 2008-04-10 Shibuya Kogyo Co Ltd 物品把持装置
JP6612589B2 (ja) * 2015-11-06 2019-11-27 東京応化工業株式会社 支持体分離装置及び支持体分離方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718280U (enExample) * 1971-03-31 1972-10-31

Also Published As

Publication number Publication date
JPS6244387A (ja) 1987-02-26

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