JPS6244387A - 保持機構 - Google Patents

保持機構

Info

Publication number
JPS6244387A
JPS6244387A JP18074385A JP18074385A JPS6244387A JP S6244387 A JPS6244387 A JP S6244387A JP 18074385 A JP18074385 A JP 18074385A JP 18074385 A JP18074385 A JP 18074385A JP S6244387 A JPS6244387 A JP S6244387A
Authority
JP
Japan
Prior art keywords
holding
holding member
workpiece
actuator
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18074385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232119B2 (enExample
Inventor
茂 谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18074385A priority Critical patent/JPS6244387A/ja
Publication of JPS6244387A publication Critical patent/JPS6244387A/ja
Publication of JPH0232119B2 publication Critical patent/JPH0232119B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP18074385A 1985-08-16 1985-08-16 保持機構 Granted JPS6244387A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18074385A JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18074385A JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Publications (2)

Publication Number Publication Date
JPS6244387A true JPS6244387A (ja) 1987-02-26
JPH0232119B2 JPH0232119B2 (enExample) 1990-07-18

Family

ID=16088534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18074385A Granted JPS6244387A (ja) 1985-08-16 1985-08-16 保持機構

Country Status (1)

Country Link
JP (1) JPS6244387A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002141395A (ja) * 2000-11-02 2002-05-17 Assist Japan Kk 基板保持における基板有無確認方法及び装置
JP2006210373A (ja) * 2005-01-25 2006-08-10 Yaskawa Electric Corp ウェハのアライナー装置
JP2008080458A (ja) * 2006-09-28 2008-04-10 Shibuya Kogyo Co Ltd 物品把持装置
KR20170053565A (ko) * 2015-11-06 2017-05-16 도오꾜오까고오교 가부시끼가이샤 지지체 분리 장치 및 지지체 분리 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718280U (enExample) * 1971-03-31 1972-10-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718280U (enExample) * 1971-03-31 1972-10-31

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002141395A (ja) * 2000-11-02 2002-05-17 Assist Japan Kk 基板保持における基板有無確認方法及び装置
JP2006210373A (ja) * 2005-01-25 2006-08-10 Yaskawa Electric Corp ウェハのアライナー装置
JP2008080458A (ja) * 2006-09-28 2008-04-10 Shibuya Kogyo Co Ltd 物品把持装置
KR20170053565A (ko) * 2015-11-06 2017-05-16 도오꾜오까고오교 가부시끼가이샤 지지체 분리 장치 및 지지체 분리 방법
JP2017092196A (ja) * 2015-11-06 2017-05-25 東京応化工業株式会社 支持体分離装置及び支持体分離方法

Also Published As

Publication number Publication date
JPH0232119B2 (enExample) 1990-07-18

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