JPH0231126U - - Google Patents
Info
- Publication number
- JPH0231126U JPH0231126U JP10901988U JP10901988U JPH0231126U JP H0231126 U JPH0231126 U JP H0231126U JP 10901988 U JP10901988 U JP 10901988U JP 10901988 U JP10901988 U JP 10901988U JP H0231126 U JPH0231126 U JP H0231126U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gas injection
- lower ring
- upper gas
- shaped cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims 8
- 239000012495 reaction gas Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 10
- 238000007796 conventional method Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10901988U JPH0231126U (en:Method) | 1988-08-18 | 1988-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10901988U JPH0231126U (en:Method) | 1988-08-18 | 1988-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231126U true JPH0231126U (en:Method) | 1990-02-27 |
Family
ID=31344892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10901988U Pending JPH0231126U (en:Method) | 1988-08-18 | 1988-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231126U (en:Method) |
-
1988
- 1988-08-18 JP JP10901988U patent/JPH0231126U/ja active Pending
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