JPH0230440Y2 - - Google Patents
Info
- Publication number
- JPH0230440Y2 JPH0230440Y2 JP2313386U JP2313386U JPH0230440Y2 JP H0230440 Y2 JPH0230440 Y2 JP H0230440Y2 JP 2313386 U JP2313386 U JP 2313386U JP 2313386 U JP2313386 U JP 2313386U JP H0230440 Y2 JPH0230440 Y2 JP H0230440Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- shield
- substrate
- heat
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000003779 heat-resistant material Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2313386U JPH0230440Y2 (xx) | 1986-02-19 | 1986-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2313386U JPH0230440Y2 (xx) | 1986-02-19 | 1986-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62136565U JPS62136565U (xx) | 1987-08-28 |
| JPH0230440Y2 true JPH0230440Y2 (xx) | 1990-08-16 |
Family
ID=30821171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2313386U Expired JPH0230440Y2 (xx) | 1986-02-19 | 1986-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230440Y2 (xx) |
-
1986
- 1986-02-19 JP JP2313386U patent/JPH0230440Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62136565U (xx) | 1987-08-28 |
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