JPH0226936Y2 - - Google Patents

Info

Publication number
JPH0226936Y2
JPH0226936Y2 JP8663884U JP8663884U JPH0226936Y2 JP H0226936 Y2 JPH0226936 Y2 JP H0226936Y2 JP 8663884 U JP8663884 U JP 8663884U JP 8663884 U JP8663884 U JP 8663884U JP H0226936 Y2 JPH0226936 Y2 JP H0226936Y2
Authority
JP
Japan
Prior art keywords
substrate
ring
holder
hole
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8663884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS612451U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8663884U priority Critical patent/JPS612451U/ja
Publication of JPS612451U publication Critical patent/JPS612451U/ja
Application granted granted Critical
Publication of JPH0226936Y2 publication Critical patent/JPH0226936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8663884U 1984-06-13 1984-06-13 基板ホルダ装置 Granted JPS612451U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8663884U JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8663884U JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Publications (2)

Publication Number Publication Date
JPS612451U JPS612451U (ja) 1986-01-09
JPH0226936Y2 true JPH0226936Y2 (enrdf_load_html_response) 1990-07-20

Family

ID=30638131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8663884U Granted JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Country Status (1)

Country Link
JP (1) JPS612451U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS612451U (ja) 1986-01-09

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