JPS612451U - 基板ホルダ装置 - Google Patents

基板ホルダ装置

Info

Publication number
JPS612451U
JPS612451U JP8663884U JP8663884U JPS612451U JP S612451 U JPS612451 U JP S612451U JP 8663884 U JP8663884 U JP 8663884U JP 8663884 U JP8663884 U JP 8663884U JP S612451 U JPS612451 U JP S612451U
Authority
JP
Japan
Prior art keywords
holder device
board holder
ring
substrate
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8663884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226936Y2 (enrdf_load_html_response
Inventor
真二 富永
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP8663884U priority Critical patent/JPS612451U/ja
Publication of JPS612451U publication Critical patent/JPS612451U/ja
Application granted granted Critical
Publication of JPH0226936Y2 publication Critical patent/JPH0226936Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP8663884U 1984-06-13 1984-06-13 基板ホルダ装置 Granted JPS612451U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8663884U JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8663884U JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Publications (2)

Publication Number Publication Date
JPS612451U true JPS612451U (ja) 1986-01-09
JPH0226936Y2 JPH0226936Y2 (enrdf_load_html_response) 1990-07-20

Family

ID=30638131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8663884U Granted JPS612451U (ja) 1984-06-13 1984-06-13 基板ホルダ装置

Country Status (1)

Country Link
JP (1) JPS612451U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0226936Y2 (enrdf_load_html_response) 1990-07-20

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