JPH0226229U - - Google Patents
Info
- Publication number
- JPH0226229U JPH0226229U JP10320488U JP10320488U JPH0226229U JP H0226229 U JPH0226229 U JP H0226229U JP 10320488 U JP10320488 U JP 10320488U JP 10320488 U JP10320488 U JP 10320488U JP H0226229 U JPH0226229 U JP H0226229U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- plasma
- cleaning process
- measurement means
- transmission section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000004886 process control Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320488U JPH0226229U (ko) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320488U JPH0226229U (ko) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226229U true JPH0226229U (ko) | 1990-02-21 |
Family
ID=31333814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10320488U Pending JPH0226229U (ko) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226229U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0805481A2 (en) * | 1990-08-29 | 1997-11-05 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| JP2014045113A (ja) * | 2012-08-28 | 2014-03-13 | Shimadzu Corp | エンドポイント検出器 |
-
1988
- 1988-08-05 JP JP10320488U patent/JPH0226229U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0805481A2 (en) * | 1990-08-29 | 1997-11-05 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
| EP0805481B1 (en) * | 1990-08-29 | 2006-06-21 | Hitachi, Ltd. | Operating method for vacuum processing apparatus |
| JP2014045113A (ja) * | 2012-08-28 | 2014-03-13 | Shimadzu Corp | エンドポイント検出器 |
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