JPH0226229U - - Google Patents

Info

Publication number
JPH0226229U
JPH0226229U JP10320488U JP10320488U JPH0226229U JP H0226229 U JPH0226229 U JP H0226229U JP 10320488 U JP10320488 U JP 10320488U JP 10320488 U JP10320488 U JP 10320488U JP H0226229 U JPH0226229 U JP H0226229U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10320488U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10320488U priority Critical patent/JPH0226229U/ja
Publication of JPH0226229U publication Critical patent/JPH0226229U/ja
Application status is Pending legal-status Critical

Links

JP10320488U 1988-08-05 1988-08-05 Pending JPH0226229U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10320488U JPH0226229U (en) 1988-08-05 1988-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10320488U JPH0226229U (en) 1988-08-05 1988-08-05

Publications (1)

Publication Number Publication Date
JPH0226229U true JPH0226229U (en) 1990-02-21

Family

ID=31333814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10320488U Pending JPH0226229U (en) 1988-08-05 1988-08-05

Country Status (1)

Country Link
JP (1) JPH0226229U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0805481A2 (en) * 1990-08-29 1997-11-05 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor
JP2014045113A (en) * 2012-08-28 2014-03-13 Shimadzu Corp Endpoint detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0805481A2 (en) * 1990-08-29 1997-11-05 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor
EP0805481B1 (en) * 1990-08-29 2006-06-21 Hitachi, Ltd. Operating method for vacuum processing apparatus
JP2014045113A (en) * 2012-08-28 2014-03-13 Shimadzu Corp Endpoint detector

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