JPH0226229U - - Google Patents

Info

Publication number
JPH0226229U
JPH0226229U JP10320488U JP10320488U JPH0226229U JP H0226229 U JPH0226229 U JP H0226229U JP 10320488 U JP10320488 U JP 10320488U JP 10320488 U JP10320488 U JP 10320488U JP H0226229 U JPH0226229 U JP H0226229U
Authority
JP
Japan
Prior art keywords
reaction chamber
plasma
cleaning process
measurement means
transmission section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10320488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10320488U priority Critical patent/JPH0226229U/ja
Publication of JPH0226229U publication Critical patent/JPH0226229U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10320488U 1988-08-05 1988-08-05 Pending JPH0226229U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10320488U JPH0226229U (enrdf_load_stackoverflow) 1988-08-05 1988-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10320488U JPH0226229U (enrdf_load_stackoverflow) 1988-08-05 1988-08-05

Publications (1)

Publication Number Publication Date
JPH0226229U true JPH0226229U (enrdf_load_stackoverflow) 1990-02-21

Family

ID=31333814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10320488U Pending JPH0226229U (enrdf_load_stackoverflow) 1988-08-05 1988-08-05

Country Status (1)

Country Link
JP (1) JPH0226229U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0805481B1 (en) * 1990-08-29 2006-06-21 Hitachi, Ltd. Operating method for vacuum processing apparatus
JP2014045113A (ja) * 2012-08-28 2014-03-13 Shimadzu Corp エンドポイント検出器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0805481B1 (en) * 1990-08-29 2006-06-21 Hitachi, Ltd. Operating method for vacuum processing apparatus
JP2014045113A (ja) * 2012-08-28 2014-03-13 Shimadzu Corp エンドポイント検出器

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