JPS6452366A - Surface analyzing device with gas discharge type ion gun - Google Patents
Surface analyzing device with gas discharge type ion gunInfo
- Publication number
- JPS6452366A JPS6452366A JP20815187A JP20815187A JPS6452366A JP S6452366 A JPS6452366 A JP S6452366A JP 20815187 A JP20815187 A JP 20815187A JP 20815187 A JP20815187 A JP 20815187A JP S6452366 A JPS6452366 A JP S6452366A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- fluctuation
- current
- error signal
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To improve the analysis precision at the fluctuation of the secondary ion emission quantity by directly detecting ions by the arc discharge, comparing the detected discharge current with the preset voltage, converting the fluctuation into the error signal, and automatically controlling the discharge. CONSTITUTION:A needle-shaped probe electrode 6 detecting the arc discharge current by the gas discharge is vertically installed in an ionization chamber, end a current-voltage conversion/error signal voltage calculation circuit 8 amplifying the minor current detected by the probe electrode 6 and converting it into the voltage then comparing the converted voltage with the preset voltage, and calculating the error signal voltage is provided. An arc discharge voltage generating power source 10 controlling the voltage across a cathode 5 and an anode 3 based on the error signal voltage is provided. The voltage across the cathode 5 and the anode 3 is automatically controlled by the fluctuation of detected ions by the probe electrode 6. A stable ion current is thereby obtained, thus the fluctuation quantity of the secondary ions emitted from the surface is decreased, the error of the measured intensity is reduced, and the analysis precision is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20815187A JPS6452366A (en) | 1987-08-24 | 1987-08-24 | Surface analyzing device with gas discharge type ion gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20815187A JPS6452366A (en) | 1987-08-24 | 1987-08-24 | Surface analyzing device with gas discharge type ion gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6452366A true JPS6452366A (en) | 1989-02-28 |
Family
ID=16551484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20815187A Pending JPS6452366A (en) | 1987-08-24 | 1987-08-24 | Surface analyzing device with gas discharge type ion gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6452366A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020057510A (en) * | 2018-10-02 | 2020-04-09 | 株式会社アルバック | Ion gun controller and ion gun control method |
-
1987
- 1987-08-24 JP JP20815187A patent/JPS6452366A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020057510A (en) * | 2018-10-02 | 2020-04-09 | 株式会社アルバック | Ion gun controller and ion gun control method |
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