JPS6452366A - Surface analyzing device with gas discharge type ion gun - Google Patents

Surface analyzing device with gas discharge type ion gun

Info

Publication number
JPS6452366A
JPS6452366A JP20815187A JP20815187A JPS6452366A JP S6452366 A JPS6452366 A JP S6452366A JP 20815187 A JP20815187 A JP 20815187A JP 20815187 A JP20815187 A JP 20815187A JP S6452366 A JPS6452366 A JP S6452366A
Authority
JP
Japan
Prior art keywords
voltage
fluctuation
current
error signal
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20815187A
Other languages
Japanese (ja)
Inventor
Tetsuya Mega
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP20815187A priority Critical patent/JPS6452366A/en
Publication of JPS6452366A publication Critical patent/JPS6452366A/en
Pending legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To improve the analysis precision at the fluctuation of the secondary ion emission quantity by directly detecting ions by the arc discharge, comparing the detected discharge current with the preset voltage, converting the fluctuation into the error signal, and automatically controlling the discharge. CONSTITUTION:A needle-shaped probe electrode 6 detecting the arc discharge current by the gas discharge is vertically installed in an ionization chamber, end a current-voltage conversion/error signal voltage calculation circuit 8 amplifying the minor current detected by the probe electrode 6 and converting it into the voltage then comparing the converted voltage with the preset voltage, and calculating the error signal voltage is provided. An arc discharge voltage generating power source 10 controlling the voltage across a cathode 5 and an anode 3 based on the error signal voltage is provided. The voltage across the cathode 5 and the anode 3 is automatically controlled by the fluctuation of detected ions by the probe electrode 6. A stable ion current is thereby obtained, thus the fluctuation quantity of the secondary ions emitted from the surface is decreased, the error of the measured intensity is reduced, and the analysis precision is improved.
JP20815187A 1987-08-24 1987-08-24 Surface analyzing device with gas discharge type ion gun Pending JPS6452366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20815187A JPS6452366A (en) 1987-08-24 1987-08-24 Surface analyzing device with gas discharge type ion gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20815187A JPS6452366A (en) 1987-08-24 1987-08-24 Surface analyzing device with gas discharge type ion gun

Publications (1)

Publication Number Publication Date
JPS6452366A true JPS6452366A (en) 1989-02-28

Family

ID=16551484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20815187A Pending JPS6452366A (en) 1987-08-24 1987-08-24 Surface analyzing device with gas discharge type ion gun

Country Status (1)

Country Link
JP (1) JPS6452366A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020057510A (en) * 2018-10-02 2020-04-09 株式会社アルバック Ion gun controller and ion gun control method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020057510A (en) * 2018-10-02 2020-04-09 株式会社アルバック Ion gun controller and ion gun control method

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